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OFHC Copper Backing Plates

Features

Machined from oxygen-free, high-conductivity copper.

  • For regular, circular disc-type sputtering sources
  • TORUS® 2, 3, and 4 accepts a 0.092" thick backing plate, found in the ordering table below
  • Most sputter sources accept a 0.125" (1/8") thick target bonded to a 0.125" thick backing plate
  • For targets of other thicknesses, choose the backing plate thickness to adjust the total thickness to 0.250" (1/4") to suit most applications

NOTE:

  • Those identified in the chart by diameter and thickness only are plain discs without through or tapped holes.
  • They are suitable for most circular target sources from other manufacturers, although they may need minor machining for screw, clamps, etc.
  • Copper Cup Backing Plates available upon request.

Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Target
Size
PartNo Price Add To
Cart
Target
Size
PartNo Price Add To
Cart
1.3" x 0.125"
(With Magnetic Keeper)
EJBPCU01.3K+ $75.00
1.0" x 0.0625"
EJBPCU01A1 $75.00
1.0" x 0.125"
EJBPCU01A2 $40.00
2.0" x 0.0625"
EJBPCU02A1 $70.00
2.0" x 0.125"
EJBPCU02A2 $50.00
2.0" x 0.125"
(With Magnetic Keeper)
EJBPCU02K2 $75.00
2.00" x 0.092" (For Torus 2)
EJBPCU02T2 P.O.R.
3.0" x 0.0625"
EJBPCU03A1 $80.00
3.0" x 0.125"
EJBPCU03A2 $60.00
3.0" x 0.125"
(With Magnetic Keeper)
EJBPCU03K2 $95.00
3.00" x 0.092" (For Torus 3)
EJBPCU03T2 P.O.R.
4.0" x 0.0625"
EJBPCU04A1 $85.00
4.0" x 0.125"
EJBPCU04A2 $70.00
4.00" x 0.092" (For Torus 4)
EJBPCU04T2 P.O.R.
5.0" x 0.0625"
EJBPCU05A1 P.O.R.
5.0" x 0.125"
EJBPCU05A2 $110.00
6.0" x 0.0625"
EJBPCU06A1 P.O.R.
6.0" x 0.125"
EJBPCU06A2 $130.00
6.0" x 0.250"
EJBPCU06A4 $195.00
6.0" x 0.125"
(With Magnetic Keeper)
EJBPCU06K2 P.O.R.
7.0" x 0.125"
EJBPCU07A2 $140.00
7.0" x 0.250"
EJBPCU07A4 P.O.R.
8.0" x 0.125"
EJBPCU08A2 $150.00
8.0" x 0.250"
EJBPCU08A4 P.O.R.
TORUS 10 Full
(6.375" x 0.50")
EJBPT10FULL P.O.R.

 

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