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OFHC Copper Backing Plates
Features
Machined from oxygen-free, high-conductivity copper.
- For regular, circular disc-type sputtering sources
- Most sputter sources, including our TORUS® 1, 2, 3 cathodes, accept a 0.125" (1/8") thick target bonded to a 0.125" thick backing plate
- For targets of other thicknesses, choose the backing plate thickness to adjust the total thickness to 0.250" (1/4") to suit most applications
NOTE:
- Those identified in the chart by diameter and thickness only are plain discs without through or tapped holes.
- They are suitable for most circular target sources from other manufacturers, although they may need minor machining for screw, clamps, etc.
- Copper Cup Backing Plates available upon request.
Ordering Table
| Target Size |
PartNo |
|---|---|
Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]
