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Our low temperature evaporator (LTE) deposits volatile organic materials for thin film formation needed to produce organic light emitting devices (OLEDs), photovoltaic cells, and other organic material-based devices.
PID temperature control and uniform SCR-based power output using our M.A.P.S. power supplies enables precise deposition rate control and ensures a high-quality, uniform films.
Multiple sources may be arrayed in order to co-deposit dyed or doped films for color displays.
- UHV compatible
- "Plug-in" source design facilitates easy removal
- Unique design for use with low temperature volatile organics
- Ability to grow films with 5% uniformity on 150mm substrates at > 5 Å/sec.
- Optimum plume configuration distributes material evenly across substrate
- PID control (±0.1° C) for low temperature operation (50° C to 600° C)
- Thermocouple in contact with crucible base for accurate temperature readings
- Efficient heater coil for optimum heating profile
- Easy to remove source cover for crucible exchange
- Alumina crucibles reduce organic spitting while evenly distributing temperature
- Integral flip shutter available
NOTE: The published dimensions will no longer include the shutter option.
|Model||LTE 01||LTE 10||LTE 30|
|Diameter||1.5" O.D.||2.24" O.D.||2.44" O.D.|
|Standard Crucible||5cc Alumina||15cc Alumina||35cc Alumina|
|Temperature Range||50°C to 600°C||50°C to 600°C||50°C to 600°C|
Typical LTE 10 Throw Rates(300mm Throw Distance)
|AlQ3||0.2 to 5.0 Å/sec|
|PTCDA||0.2 to 2.0 Å/sec|
|CuPc||0.2 to 2.0 Å/sec|
|C60||0.2 to 2.0 Å/sec|
Contact firstname.lastname@example.org to discuss your specific vacuum application and process equipment needs.