TORUS® Mag Keeper™ UHV Compatible Circular Magnetron Sputtering Sources
KJLC's Mag Keeper is designed to enable higher operating powers due to a mechanically enhanced cooling well. It is ideal for use in high throughput requirements and also enables quick target change with its magnetic keeper design, which secures the target to the source. The design has NO o-rings and utilizes ceramic insulators, making it both UHV and high temp compatible.
Start Your Configuration
Choose the series, flange size, axial stroke, actuation option, and end-effector. Next, compose the order code as shown, below.