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Deposition Sources > TORUS® Magnetron Sputtering Cathodes > TORUS® R&D Magnetron Sputtering Sources

TORUS® Circular UHV (Ultra High Vacuum) Magnetron Sputtering Sources

Magnetron Performance
Optimization Guide
To learn more about sputtering rates and uniformity, click here.

We offer a comprehensive line of circular TORUS® magnetron sputter sources, in 2" and 3" diameters, suited for ultra high vacuum R & D applications. Traditional, flange mounted, welded UHV design with removable magnets from atmosphere during bake out. These sputter sources are "True UHV" cathodes, able to reach base pressures below 10-10 Torr due to their all-welded construction and 350° C bakeout temperature. Their unique high-strength rare earth magnet arrays can be adjusted without breaking vacuum, enabling the user to optimize the sputtering profile. Additionally, these sputter sources are available with an integral gas injection port for introducing the process gas directly to the target.

TORUS UHV Sources feature

  • Versatile RF, DC, and Pulsed-DC operation
  • True UHV all-welded design (no elastomeric seals)
  • Excellent film uniformity (±3%) and target utilization (up to 30%)
  • Integral gas injection port to introduce process gas at the target's surface
  • Optional deposition chimneys and flip-style shutters reduce contamination during co-deposition
  • High-strength rare earth magnet arrays for sputtering magnetic and non-magnetic materials available for 3" UHV source
  • Magnet array is isolated from cooling water and can be removed without breaking vacuum
  • Standard—Type-N (male) power connectors, indirect water cooling, and balanced magnetic operation
  • Unbalanced operation is available (please contact us at sales@lesker.com for more information)
  • Cathode bakeable to 350°C (with magnet array removed)

Dimensional Drawings

TORUS Dimensions

All TORUS R&D circular sputter sources feature Type-N (male) power connectors, indirect water cooling, and balanced magnetic operation as standard. Unbalanced operation is available, please contact us for more information.

Specifications Table

ModelTM2UTM2UTM3UTM3U
Target Diam.2.0"
(50.8mm)
2.0"
(50.8mm)
3.0"
(76mm)
3.0"
(76mm)
Target Thickness0.080" - 0.25"
(2mm - 6.3mm)
0.080" - 0.25"
(2mm - 6.3mm)
0.080" - 0.25"
(2mm - 6.3mm)
0.080" - 0.25"
(2mm - 6.3mm)
Dim. A4"
(102mm)
9.25"
(235mm)
4"
(102mm)
9.25"
(235mm)
Dim. B5.24"
(133mm)
10.49"
(266mm)
5.24"
(133mm)
10.49"
(266mm)
Dim. E12.07"
(307mm)
17.32"
(440mm)
12.07"
(307mm)
17.32"
(440mm)
Mounting Flange6" CF6" CF6" CF6" CF

NOTE: * Dimensions involving flange-to-target thickness assume a standard target thickness of 1/8 inch. Add or subtract accordingly based on your particular sputter target size.

Start Your Configuration

Select from the configuration options below to create a part number and price for the particular TORUS sputter source required.
Example Configuration: TM3US064GF is a 3 " OD source mounted on a 4" body (measured from flange to target surface) with a standard magnet array mounted to a 6 " CF flange with gas injection and pneumatic flip-style shutter. Example configuration options selected shown in red below.

1. Target Diameter (target thickness):
2. Magnet Array:
3. Insertion length:
4. Flange Size:
5. Gas Injection / Deposition Chimney:
6. Shutter:
Part Number:   

Contact sales@lesker.com to discuss your specific vacuum application and process equipment needs.


Accessories Table

  Accessory Type Description PartNo Price Add
Item
  Accessory Type Description PartNo Price Add
Item
Interconnect Cable
Type HN Plug To Type N Plug, RG213, 3ft LG
EJCBL3HN P.O.R.
Interconnect Cable
Type N Plug To Type N Plug, RG213, 3ft LG
EJCBL3NN P.O.R.
Interconnect Cable
Type N Plug To Pigtail (1/4"Ring Lug Center Connector And Flying Ground Wire), RG213, 3ft LG
EJCBL3NP P.O.R.
Interconnect Cable
Type N Plug To UHFvPlug, RgG213, 3ft LG
EJCBL3NU P.O.R.
Power Supply
1kW DC, Typically Recommended For 2" And 3" Cathodes
DC01BP-2U $6,200.00
Power Supply
2kW DC, Typically Recommended For 3" Cathodes
DC02BP-2U $6,100.00
Power Supply
300W RF, Typically Recommended For 2" And 3" Cathodes
RF03A22XX300 $9,335.00

 Notes:  Other Cable Lengths Available By Replacing the '3' With the Desired Length in Feet

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