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Deposition Sources > TORUS® Magnetron Sputtering Cathodes

Magnetron Sputtering Cathode Services

Magnetron Performance
Optimization Guide
To learn more about sputtering rates and uniformity, click here.

We design, manufacture, and service all of our TORUS® sputter sources. Our in-house experts have decades of combined magnetron cathode applications and service experience.

Magnetron Cathode Retrofits:

We can produce retrofit magnetron designs for many obsolete sputter source cathode designs. Perkin Elmer and Varian sputtering systems, among others, are serviced and retrofitted in our dedicated cathode assembly clean area at our Pittsburgh, Pennsylvania, U.S. facility.

Magnetron Cathode Rebuild Service:

We offer a complete rebuild service for our popular TORUS brand and other magnetron cathodes in both circular and linear configurations.

We can supply retrofit assemblies, service and replace worn parts, or provide a complete rebuild based on your specifications.

Contact sales@lesker.com to discuss your specific vacuum application and process equipment needs.


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