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Evaporation Sources > Thermal Box Sources > SiO Baffled Box Heaters

Rechargeable Baffled Boxes

Excellent thermal sources for depositing thin film of silicon monoxide.

How they work

  • The box is loaded with SiO before use (not exceeding the weight indicated for that box)
  • Bulk SiO is held in compartment(s) indirectly connected to the chimney
  • As the box is heated, the SiO vapor is forced to flow through a series of baffles before exiting at the chimney
  • Since there is no line of sight between the bulk material and the substrate surface, the deleterious effects of spitting or streaming on the depositing film are eliminated

Additional information

  • Available in non-rechargeable and rechargeable—named to reflect the location of the initial charging or recharging
  • A rechargeable box can be filled through one or two lids while still mounted on its electrical feedthroughs in the vacuum chamber
  • A non-rechargeable box must be dismounted from its electrical feedthroughs and disassembled before charging or re-charging
  • Both styles offer long life and can be recharged many times
  • Designed with two evaporation plume directions—upward "vertical" or downward "inverted" (by turning either source on its side, a "horizontal" plume can be arranged)

Don’t forget to order your evaporation materials.

Pellets/Pieces

Dimensional Drawings


Ordering Table

Description Figure Weight
Sio
No. Per
Pack
Dim A
(in.)
Dim B
(in.)
Dim C
(in.)
Dim D
(in.)
Dim E
(in.)
Volt Amps Watts Temp. PartNo Price Add To
Cart
Description Figure Weight
Sio
No. Per
Pack
Dim A
(in.)
Dim B
(in.)
Dim C
(in.)
Dim D
(in.)
Dim E
(in.)
Volt Amps Watts Temp. PartNo Price Add To
Cart
Inverted with 1 Loading Cap
1
1.5 g
1
1-1/4
5/8
N/A
1
1-1/2
0.91
328
298
1200°C
EVSSO21 $186.00
Vertical with 1 Loading Cap
1
1.5 g
1
1-1/4
5/8
N/A
1
1-1/2
0.86
333
286
1200°C
EVSSO20 $186.00
Inverted with 1 Loading Cap
2
6.5 g
1
2-1/2
7/8
1/2
3/4
1
1.31
236
309
1200°C
EVSSO23 $235.00
Vertical with 1 Loading Cap
2
6.5 g
1
2-1/2
7/8
1/2
3/4
1
1.34
246
330
1200°C
EVSSO22 $235.00
Inverted with 2 Loading Caps
3
6.5 g
1
2-1/2
7/8
1/2
3/4
1-1/4
1.40
256
358
1200°C
EVSSO11 $289.00
Vertical with 2 Loading Caps
3
6.5 g
1
2-1/2
7/8
1/2
3/4
1-1/4
1.40
257
360
1200°C
EVSSO10 $289.00
Inverted with 2 Loading Caps
4
13 g
1
3-1/4
1-1/8
5/8
3/4
1-1/4
1.58
272
430
1200°C
EVSSO25 $314.00
Vertical with 2 Loading Caps
4
13 g
1
3-1/4
1-1/8
5/8
3/4
1-1/4
1.67
264
441
1200°C
EVSSO24 $309.00
Side (Horizontal) with 2 Loading Caps
5
13 g
1
3-1/4
1-1/8
5/8
3/4
1-1/4
1.62
271
439
1200°C
EVSSO26 $320.00

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