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Flanges & Components > Viewports & Shutters > ConFlat (CF) Flanged Viewports

CF Flanged Re-Entrant Quartz Viewports

CF Flanged Optical Glass Viewports Features:

  • Built from the highest-quality materials to UHV standards
  • Compatible with vacuum systems capable of reaching UHV levels
  • Viewports should be sealed with fully annealed copper gaskets to reduce induced strain
  • If the process deposits material, we strongly recommend a viewport shutter because deposits can damage and impair the optical properties of the lens.

UV Quartz Features:

  • Leak Rate <2x10-10 atm cc/sec He
  • Parallelism <30 Arc Minutes
  • 304L Stainless Steel Flange
  • Temperature Range -100°C to 200°C
  • Surface Finish 40/20
  • Corning HPFS 7980 Fused Silica
  • Homogeneity Grade F
  • Inclusion Class 2
  • Transmission >90% @ 250nm (external)

DUV Quartz Features:

  • Leak Rate <2x10-10 atm cc/sec He
  • Parallelism <10 Arc Seconds
  • 304L Stainless Steel Flange
  • λ/4 @ 632nm Transmitted Wavefront
  • Temperature Range -100°C to 200°C
  • Surface Finish 20/10
  • Corning HPFS 7980 Fused Silica
  • Homogeneity Grade A
  • Inclusion Class 0
  • Transmission ≥99.8% @ 248nm (internal)

CAUTION: safety, we strongly recommend that no viewport is exposed to a temperature ramp of greater than 2-3°C per minute, and that no viewport be exposed to direct thermal radiation. To limit thermal gradients when heating viewports, we recommend the viewing area and the flange be covered with many layers of aluminum foil to act as a reflective shield.

Viewport Cleaning Procedure Guide For a guide on Viewport Cleaning Procedures, please click here.


Dimensional Drawings

Charts

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Ordering Table

(Click column headers to sort data)

Flange
Size/OD
Glass
Type
Dim
A
Dim
B
Dim
C
Dim
D
Glass
Thickness
View
Area
PartNo Price Add Item
VacuCADSM
Flange
Size/OD
Glass
Type
Dim
A
Dim
B
Dim
C
Dim
D
Glass
Thickness
View
Area
PartNo Price Add Item
VacuCADSM
4-1/2" DUV Quartz Fused Silica 1.9 3.5 4.18 0.05 0.125 1.4
VPRE-450DU
$915.00
N/A
4-1/2" UV Quartz Fused Silica 1.9 3.5 4.18 0.05 0.125 1.4
VPRE-450Q
$750.00
N/A
6" DUV Quartz Fused Silica 2.87 3.5 4.28 0.07 0.25 2.69
VPRE-600DU
$1,555.00
N/A
6" UV Quartz Fused Silica 2.87 3.5 4.28 0.07 0.25 2.69
VPRE-600Q
$1,235.00
N/A
Flange Selection Guide
With a variety of flanges to choose from, the Flange Selection Guide is designed to help you find one to meet your vacuum requirements. Shop Now!
Can't find the flange you need or want a custom configuration? Please call us at 1-412-387-9200 or email international@lesker.com with your inquiry.

ISO:9001 The Kurt J. Lesker Company is an ISO:9001 certified company. Copyright ©1996-2017 Kurt J. Lesker Company® All rights reserved.