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Flanges & Components > Viewports & Shutters

Shutter Actuators

Shutter Actuators Features:

For thin film deposition processes, the operator must be able to cut off the flow of target material to the substrate at any instant. Typically, switching off the power to the deposition source is too slow and may be undesirable if the user wishes to form another film with that target material a short time later. Shutters, actuated by some external action, are used to obstruct material flow.

Kurt J. Lesker Company offers several models of shutter actuators for HV, VHV, and UHV conditions:

  • High vacuum models: Feature o-ring seals for the rotating shaft that moves the shutter. They are often mounted on baseplate holes
  • Very high vacuum models: Utilize Ferro Magnetic Fluid Sealed Drives that use magnetic liquid o-rings
  • Ultra-high vacuum models: Mounted on CF flanges and sealed with either bellows (on the mini model) or a MagiDrive™ mechanism

Shutter actuators can be ordered in manual or pneumatic versions.

NOTE:

  • Descriptions of rotary drive mechanisms, such as Ferro Magnetic Drives and MagiDrive, are found in the Technical Notes section of Rotary Motion Feedthroughs.
  • Shutter blades, extension shafts, bolts, or shutter arms are not included in the cost of a shutter actuator in the prices listed.

Viewport Cleaning Procedure Guide For a guide on Viewport Cleaning Procedures, please click here.


Dimensional Drawings

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VacuCAD is a free library containing thousands of 2D CAD drawings (in DXF format) and 3D Models (in STP format) for many of our standard vacuum components and chambers. Please Log in

Ordering Table

(Click column headers to sort data)

Flange
Type
Actuation
Type
Seal
Type
PartNo Price Add Item
VacuCADSM
Flange
Type
Actuation
Type
Seal
Type
PartNo Price Add Item
VacuCADSM
Baseplate (O-Ring) Manual Shutter Actuator (HV) O-Ring
EJSAMHV
P.O.R.
N/A
CF Flange (MagiDrive) Manual Shutter Actuator (UHV) MagiDrive
EJSAMUHV
P.O.R.
(please log in)
CF Flange
(Ferro Magnetic Fluid Sealed)
Manual Shutter Actuator (VHV) Ferrofluidics®
EJSAMVHV
P.O.R.
N/A
Baseplate (O-Ring) Pneumatic Shutter Actuator (HV) O-Ring
EJSAPHV
P.O.R.
N/A
CF Flange (MagiDrive) Pneumatic Shutter Actuator (UHV) MagiDrive
EJSAPUHV
P.O.R.
N/A
CF Flange
(Ferro Magnetic Fluid Sealed)
Pneumatic Shutter Actuator (VHV) Ferrofluidics®
EJSAPVHV
P.O.R.
(please log in)
Flange Selection Guide
With a variety of flanges to choose from, the Flange Selection Guide is designed to help you find one to meet your vacuum requirements. Shop Now!
Can't find the flange you need or want a custom configuration? Please call us at 1-412-387-9200 or email international@lesker.com with your inquiry.

ISO:9001 The Kurt J. Lesker Company is an ISO:9001 certified company. Copyright ©1996-2017 Kurt J. Lesker Company® All rights reserved.