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KJLC® ACG & HCG Series Capacitance Manometers

The KJLC® Capacitance Manometer line of gas type independent gauges are your best choice for high accuracy pressure measurement and control. Available for full scale ranges with all common flange types. The KJLC manometers use an ultra-pure alumina ceramic diaphragm, which is corrosion proof and allows for better signal stability, faster recovery from atmosphere, short warm up time, and an extraordinary lifetime.

Applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes requiring gauge protection
  • Data storage and display manufacturing equipment
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements
  • Industrial vacuum equipment
Product Downloads
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Specifications Table

ModelKJLC ACG 25°C AmbientKJLC HCG 45°C HeatedKJLC HCG 100°C Heated
Measurement Range0.01% of Full Scale (F.S.)0.02% of Full Scale (F.S.)0.03% of Full Scale (F.S.)
Accuracy (% of measurement)1000 Torr/1100 mbar to 1 torr F.S.: 0.2%
0.25 Torr F.S.: 0.25%
0.1 Torr/mbar F.S.: 0.5%
0.15%1000 Torr/1100 mbar to 1 torr F.S.: 0.2%
0.5 to 0.1 Torr/mbar F.S.: 0.4%
Temperature (operating)+10 to +122°F
(+5 to + 50°C)
+50 to 105°F
(+10 to + 40°C)
+50 to +122°F
(+10 to +50°C)
Temperature (storage)-40 to 150°F
(-40 to + 65°C)
-4 to 150°F
(-20 to + 65°C)
-40 to 150°F
(-40 to + 65°C)
Temperature (bakeout)≤230°F
(≤110°C)
≤250°F
(≤110°C)
≤230°F
(≤110°C)
Materials Exposed to VacuumAluminum oxide ceramic (Al2O3)
Stainless steel (AISI 316L)
Aluminum oxide ceramic (Al2O3)
Stainless steel (AISI 316L)
Aluminum oxide ceramic (Al2O3)
Stainless steel (AISI 316L)
Set-Point Relays2 (SP1, SP2)2 (SP1, SP2)2 (SP1, SP2)
Relay Response30 V (DC)≤ 30 V (DC)≤ 30 V (DC)
Internal Volume3.6 cm3 (0.22 in3)4.2 cm3 (0.26 in3)4.2 cm3 (0.26 in3)
Input Power+14 to +30 V (DC), ≤ 1 W+14 to +30 VDC or ±15 V (±5%),
≤ 12 W during heat up,
≤ 8 W at operating temperature
+14 to +30 VDC or ±15 V (±5%),
≤ 15 W during heat up,
≤ 10 W at operating temperature
ConnectionsD-Sub, 15-pin, MaleD-Sub, 15-pin, MaleD-Sub, 15-pin, Male
Compliance & StandardsCE, EN, UL, SEMI, RoHSCE, EN, UL, SEMI, RoHSCE, EN, UL, SEMI, RoHS
Weight½" Tube: 0.68 lbs. (0.31 kg.)
DN16 ISO-KF: 0.73 lbs. (0.33 kg.)
DN16 CF-R: 0.77 lbs. (0.35 kg.)
8 VCR®: 0.82 lbs. (0.37 kg.)
½" Tube: 1.85 lbs. (0.84 kg.)
DN16 ISO-KF: 1.88 lbs. (0.85 kg.)
DN16 CF-R: 1.93 lbs. (0.88 kg.)
8 VCR®: 1.98 lbs. (0.90 kg.)
½" Tube: 1.85 lbs. (0.84 kg.)
DN16 ISO-KF: 1.88 lbs. (0.85 kg.)
DN16 CF-R: 1.93 lbs. (0.88 kg.)
8 VCR®: 1.98 lbs. (0.90 kg.)

Start Your Configuration

Choose the series, measurement range, unit, flange, and pressure control option. Next, compose the order code as shown, below.

Note Due to export compliance rules, product may not be available for sale to all regions.

Please reference the ordering table below for the Heated Capacitance Manometer that we generally have in stock.

1. Series:
2. Measurement Range:
3. Unit:
4. Flange:
5. Pressure Control Option
(Optimized Signal Filter Setting):
 

Got VacuCADSM?
VacuCAD is a free library containing thousands of 2D CAD drawings (in DXF format) and 3D Models (in STP format) for many of our standard vacuum components and chambers. Please Log in

Ordering Table

Description PartNo Price Add
Item
VacuCADSM
Description PartNo Price Add
Item
VacuCADSM
45ºC Heated Capacitance Manometer - 0.1 Torr Full Scale Range, QF16 Flange Termination
HCG045-NT-1-1
P.O.R.
N/A

Accessories Notes The KJL-SPARC includes all necessary cables (power and connector) and plug adaptors for the US, EU, AU, and UK for the ambient KJLC Capacitance Manometers.

The KJL-SPARC is a compatible display with the heated 45°C or 100°C KJLC Capacitance Manometers, but will not power the units. An additional power supply is needed. See Accessories Table below for correct Power Supply.

Power supply sold separate for the KJLC Heated Capacitance Manometers.

Accessories Table

Accessory
Type
Description PartNo Price Add
Item
Accessory
Type
Description PartNo Price Add
Item
Gauge Controller and Power Supply - Ambient KJL Capacitance Manometers
KJLC Single Display Controller
KJL-SPARC
P.O.R.
Power Supply
Ambient and Heated 45ºC Capacitance Manometers
KJL-PS-CM
P.O.R.
Power Supply
Heated 100ºC Capacitance Manometers
KJL-PS-CM-100
P.O.R.

 

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