MKS® 627F Baratron® Temperature Regulated Capacitance Manometer
(0.02 - 1000 Torr) Temperature Controlled to 45 Degrees C
The 627F Baratron manometer is the RoHS-compliant version of the industry standard for stability and accuracy. It is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 45°C) is in control.
Based on established Baratron capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is inter-changeable with earlier Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.
- Excellent long-term stability
- Percent of Reading accuracy for more precise output signal in lower pressure ranges
- Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes
- Corrosion Resistant
- Temperature Compensated
- Clean room compliant
|Full Scale Ranges||0.02, 0.05, 0.1, 0.25, 1, 2, 10, 20, 100, 1000 Torr|
|Overpressure Limit||45 psia (310 kPa) or 120% Full Scale, whichever is greater|
|Materials Exposed to Vacuum||Inconel®|
|Accuracy (typical)||0.12% of Reading , 0.15% for 0.25, 0.1, and 0.05 Torr (including non-linearity, hysteresis, and non-repeatability)|
|Input Power||±15 VDC ±5% @ 0.25 Amps (maximum)|
|Resolution||0.001% of Full Scale (0.002% of Full Scale for 0.02 and 0.05 Torr)|
|Output Signal||Pressure: 0 to +10 VDC into >10K Ω load|
|Cold Start to Ready Time||1 hour for 1000 Torr Full Scale,|
4 hours for 0.1 Torr Full Scale and lower
|Ambient Temperature||15°C to 40°C|
|Compliance & Standards||Electromagnetic Compatibility CE compliant to ECD Directive 2004/108/EEC|
Restriction of Hazardous Substances Fully compliant to RoHS Directive 2002-95-EC
|Optional Features||Temperature status: one semiconductor switch will turn "ON" and corresponding green LED will be "ON" when the instrument is at temperature. |
Heater status: second semiconductor switch will turn "OFF" when heater failure occurs and corresponding bi-color LED will be blinking red, otherwise light will remain green.
946 Vacuum System Controller
Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.
Features and Benefits:
- Simultaneous control and readout for up to six MFC's and/or vacuum gauges
- Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
- Pressure readings from 1,000 Torr down to 10-11 Torr, eliminating the need for individual electronics for each sensor
- 12 set point relays included in the base unit for system control flexibility
- Standalone controller
626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs
15-pin Type "D"
This chart is to help you review all the available options for the MKS® 627F Baratron® Temperature Regulated Capacitance Manometer. Please see below for an interactive product builder to assemble the options into a part number ready for order.
Ordering Code Example: 627F01TBC1B
|Pressure Range Full Scale - Torr||Code||Configuration|
|1/2" (12.7 mm) OD tube||A||B|
|8 VCR female||B|
|1.33" OD CF||C|
|NW16 KF (range < 5000 Torr)||D|
|8 VCO female||E|
|2.75" OD CF||L|
|NW25 KF (range < 5000 Torr)||Q|
|0.12% of Reading (Ranges ≥ 1 Torr)||C||C|
|0.15% of Reading (0.25, 0.1, and 0.05 Torr units only)||D|
|0.25% of Reading (0.02 Torr units only)||E|
|Vertical calibration, no heater status indication||1||1|
|Vertical calibration, heater status indication||2|
|Horizontal calibration, no heater status indication (< 1 Torr only)||5|
|Horizontal calibration, heater status indication (< 1 Torr only)||6|
|15 pin Type D with Thread Lock||B||B|
|15 pin Type D with Slide Lock||P|
Start Your Configuration
Please select the model, range, fittings, accuracy, options, and connector to configure your part number.