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KJLC® 972 Series

Note KJLC no longer offers the 972 combination gauge. Please consider the KJLC Cold Cathode / Pirani as a possible alternative. Please contact gauging@lesker.com for further details or technical support.

Features

  • Single transducer provides a wide measurement range of 10-8 Torr to atmosphere, eliminating the need for multiple vacuum gauges
  • The MEMS based MicroPirani™ sensors allows low auto cold cathode turn-on pressure (user programmable from 2x10-4 to 1x10-3 Torr) for enhanced reliability
  • Includes both analog and digital communication for ease of operation
  • MicroPirani™ is automatically zeroed during pump down cycle for improved accuracy
  • Mountable in any orientation
  • Simplified interface via a single smoothed analog output that combines the individual vacuum sensor measurements
  • Alternate analog output and electrical connectors available to match other vendors' vacuum gauges and facilitate an easy upgrade
  • Can be used with the PDR900 Vacuum Gauge Controller and Display for Series 900 Transducers for easy set up
  • RoHS and CE Compliant

Product Manual Click here to download the product manual for this part.

Specifications Table

Sensor TypeCold Cathode/MicroPirani™(MEMS Thermal Conductivity)
Measurement Range1x10-8 Torr to Atmosphere
Communications InterfaceRS-485 or RS-232
Power Requirements9-30VDC, 2W
Temperature (operating)0° to 40°C (32° to 104°F)
Temperature (bakeout)85°C (185°F), non-operating
Max. Pressure1500 Torr
Materials Exposed to Vacuum304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic
Accuracy (typical)5x10-8 Torr to 10-3 ± 30% of reading 10-3 to 100 ± 5% of reading
Repeatability (Typical)5x10-8 Torr to 10-3 ± 30% of reading 10-3 to 100 ± 2% of reading
Mounting/Installation OrientationAny
Calibration GasNitrogen
Analog Outputs0.5 VDC/decade

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