Welcome to the Kurt J. Lesker Company.  

Sign In | Register

Current Region: International (Change) | Contact Us |   RSS   Twitter   LinkedIn   YouTube

Close

Please select your country or region to be
directed to the appropriate Lesker site.

KJLC® 979 Series Wide-Range Combination Gauges

Note KJLC no longer offers the 979 combination gauge. Please consider the 392 as a possible alternative. Please contact the KJLC product team at gauging@lesker.com with any additional questions.

Specifically designed for UHV processes and ideal for measuring the wide cyclic pressures of PVD and Ion Implantation systems.

The dual sensor design and digital interface handle high-vacuum coating applications requiring long-term stability and accuracy. The compact package makes it ideal for system integrators and equipment manufacturers in both the semiconductor and analytical markets.

Features

  • Miniature ion gauge combined with our compact Pirani sensor
  • MEMS-based digital technology for real-time data access
  • Wide measurement range of atmosphere to 10-10 Torr (mbar) for high-vacuum processes (13 decades)
  • RS-485 communications and control
  • 3 sensor independent set-point relays
  • Low power—24 VDC, 10W
  • Multi-sensor alternative with smoothed analog output (0.5–7 VDC)
  • Reduced process cycle time due to the sensor's fast, accurate, and repeatable pressure measurement
  • Two yttria-coated iridium filaments, designed for extended life, are controlled via RS-485 interface
  • Unique sensor assembly design is easily serviceable

Product Manual Click here to download the product manual for this part.

Specifications Table

Measurement Range5 x 10-10 Torr (6.7 x 10-10 mbar) to atmosphere
Communications InterfaceRS-485
Power Requirements24 VDC (10W max)
Accuracy (% of measurement)10-9 to 10-3 Torr (mbar): 20% of Reading 10-3 to 100 Torr: 5% of Reading 100 Torr to atmosphere: 25% of Reading
Temperature (operating)0-40° C
Temperature (bakeout)100° C (non-operating)
Materials Exposed to VacuumSilicon, SiO2, SiN4, gold, glass, tungsten, 304 SS, Viton, Ultem 1000, platinumclad molybdenum, yttria-coated iridium, epoxy resin
Repeatability (Typical)10-9 to 10-3 Torr (mbar): 5% of Reading 10-3 to 100 Torr (10-3 to 133 mbar): 2% of Reading 100 Torr to atmosphere (133 mbar): 10% of Reading
Set-Point Range5 x 10-10 to 100 Torr (6.7 x 10-10 to 133 mbar)
Set-Point Relays3, SPDT, 1A @ 30 VAC/DC (resistive)
Mounting/Installation OrientationAny
Calibration GasNitrogen
Analog Outputs0.5-7 VDC (0.5 VDC/decade)
Internal Volume1.47 in3

ISO:9001 The Kurt J. Lesker Company is an ISO:9001 certified company. Copyright ©1996-2017 Kurt J. Lesker Company® All rights reserved.