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Thin Film Deposition System Components



The Kurt J. Lesker Company offers a variety of stand-alone system components to upgrade your system, facilitate build-your-own systems, and/or replace components on existing vacuum systems. They include, but are not limited to: deposition sources and power supplies, load locks, entry doors, substrate handling and distribution components, and substrate heating components.

System Components

System Components

Deposition Sources

Deposition Sources Overview

Deposition sources are components that, through a variety of techniques, facilitate a physical or chemical change in a base material in order to make it useful for creating thin films. Typical deposition sources include, but are not limited to, magnetron sputtering cathodes, thermal evaporation sources, electron beam evaporation sources, and ion beam sources.

KJLC manufactures, assembles, tests, and integrates TORUS® magnetron sputtering cathodes, resistive thermal evaporation equipment, and point source evaporators, both as stand-alone products to the vacuum science market and for use in our own thin film vacuum deposition systems.



TORUS® Magnetron Sputtering Cathodes

TORUS®R&D Magnetron Sputtering Sources

TORUS® Magnetron Sputtering Cathodes

  • Allow Deposition of Virtually Any Target Material
  • Driven by RF, DC, & Pulsed DC Power
  • High Vacuum & Ultra High Vacuum Models
  • Linear & Circular Models
  • Maintenance & Rebuild Service

Applications

  • Automotive
  • Architectural Glass
  • Photovoltaics
  • Superconducors
  • Tool Coating
  • Wear Coating
  • Displays
  • Lighting
  • Medical
  • Optical
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Isoflux Inverted Magnetrons

Isoflux Inverted Magnetrons

Isoflux Inverted Magnetrons

  • Cylindrical Targets Surround the Substrate With Coating Material
  • Eliminates Substrate Rotation in Most Applications
  • Driven by DC, Pulsed DC, or AC Power
  • Patented Cathode Designs
  • Conformal 3D Coatings
  • Up to 75% Target Utilization

Applications

  • Wire & Fiberoptic Coating
  • Optical Coatings
  • Biocompatible/Antimicrobial Coatings
  • Solar Tubes
  • Medical Coatings (Stents, Catheters)
  • Superconducting Ribbons
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Thermal Evaporation Sources

Thermal Evaporation Sources

Thermal Evaporation Sources

  • Thermal Evaporation Via Resistive Element Heating
  • Filaments, Boats, Boxes, & Rods
  • Point Source Evaporation Sources (Organic Materials)
  • Feedthrough Mounted Mini-Evaporation Models
  • Flange-Mounted Resistive Evaporator Kits

Applications

  • Automotive
  • Photovoltaics
  • Displays
  • Lighting
  • Medical
  • Optical
  • OLED (Organic Light Emitting Devices)
  • Organic Based Electronic Devices
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Power Supplies

Power Supplies Overview

Power supplies are components that drive other vacuum system components such as deposition sources and heaters. KJLC offers two major categories of power supplies: RF & DC, for various applications.



Radio Frequency (RF) Power Supplies

Radio Frequency (RF) Magnetron
Sputtering Power Supplies

Radio Frequency (RF) Magnetron Sputtering Power Supplies

  • Packages Include Generator, Auto Matching Network, & Controller
  • 300W Through 3000W Output Power Models
  • Magnetron Sputtering & Substrate Biasing Applications

Applications

  • Automotive
  • Architectural Glass
  • Photovoltaics
  • Superconducors
  • Tool Coating
  • Wear Coating
  • Displays
  • Lighting
  • Medical
  • Optical
More Info ▶
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Direct Current (DC) Power Supplies

Direct Current (DC) Magnetron
Sputtering Power Supplies

Direct Current (DC) Magnetron Sputtering Power Supplies

  • Reliable, Robust Power Supplies
  • Over 90% Efficient
  • 1kW to 120kW Output Power Models
  • Straight DC & Pulsed DC Models
  • Magnetron Sputtering & Substrate Biasing Applications

Applications

  • Automotive
  • Architectural Glass
  • Photovoltaics
  • Superconducors
  • Tool Coating
  • Wear Coating
  • Displays
  • Lighting
  • Medical
  • Optical
More Info ▶
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System Components

System Components Overview

System components are components that are integral parts of a typical vacuum system. They include load locks for transferring samples from atmosphere into the vacuum envelope, fast entry doors for easy access to the vacuum envelope, substrate distribution equipment for multi-chamber (cluster tool) applications, and substrate heating components.



Load Locks

Load Lock Chamber & Assemblies

Load Lock Chamber & Assemblies

  • Convenient Sample Transfer
  • Pump & Vent without Contaminating Main Chamber
  • Stealth, Cylindrical, Planar, & Utility Models
  • Load Lock Assemblies (Including Pumping & Transfer Arm Options)
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Fast Entry Doors

Fast Entry Doors

Fast Entry Doors

  • Allows Quick, Convenient Access to Vacuum Envelope
  • Wide Variety of Mounting Flanges
  • Available With or Without Viewports
  • Borosilicate Glass Standard, Quartz Glass Optional
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Substrate Distribution

Substrate Distribution Modules

Substrate Distribution Modules

  • Facilitates Multi-Chamber In-Vacuum Transfer
  • Manual, User-Assist Automated, Fully Automated, and Computer Controlled Units
  • Rail System, Rack & Pinion, and Robotic Transfer Units
  • Substrate Sizes up to 300mm (12")
  • Integrated Pumping
  • Payloads up to 5 lbs
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Substrate Heating Components

Substrate Heating Components

Substrate Heating Components

  • EpiCentre Heating & Rotation Stages for Substrate Heating & Handling
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Deposition Monitors & Controllers

Deposition Monitors & Controllers Overview

The thickness of a deposited film is often a critical component to obtain desired film performance. Quartz crystal monitors are utilized to monitor or control film thickness during deposition. KJLC offers a variety of options, covering everything from simple monitoring of a single film to controlling complex co-deposition. For a more in depth look at what KJLC has to offer please visit our Selection Guide or our Tech Notes Section.



Thin Film Monitors

Thin Film Monitors

Thin Film Monitors

  • Entry level monitors compatible with INFICON crystal sensors.
  • Two (2) sensor head inputs standard; Four (4) additional inputs optional.
  • Easy to use Windows software included allows data to be saved and displayed in Excel.
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Thin Film Controllers

Thin Film Controllers

Thin Film Controllers

  • Integrate with deposition sources to accurately control film thickness.
  • Eight (8) to Twenty-eight (28) sensor head inputs available depending on model/application.
  • Advanced options such as co-deposition control, auto-Z, and process film control included on some models.
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INFICON Sensors

INFICON Sensors

INFICON Sensors

  • The sensor is the in situ crystal holding component of the monitor/controller system.
  • Single, dual, bakeable, and shuttered sensors available.
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INFICON Feedthroughs

INFICON Feedthroughs

INFICON Feedthroughs

  • Some sensors are welded to the feedthrough at the factory, but feedthroughs can also be ordered separately.
  • 2.75" CF flanges and 1" bolt hole feedthroughs available.
  • Ultra-Torr fittings do not require welding.
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Quartz Crystals

Quartz Crystals

Quartz Crystals

  • The 'consumable' item, crystals are deposited on to measure film thickness.
  • Gold, silver, and alloy crystals available based on application.
More Info ▶
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