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Gas & Liquid Mgmt > Mass Flow Control

GF40/GF80 Series – Mass Flow Controllers

Elastomer and Metal Seal Digital Mass Flow Controllers and Meters

Overview

Brooks GF40 (elastomer seal) and GF80 (metal seal) thermal mass flow controllers (MFCs) and thermal mass flow meters (MFMs) achieve unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications.

At the heart of the GF40/GF80 is Brooks’ patented 4th generation MultiFloTM capable device. MultiFlo overcomes a long-standing limitation of many thermal MFCs – when changing gas types, a simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for accuracy-robbing viscosity and density differences. The Brooks MultiFlo database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases making the GF40/GF80 Series among the most accurate and flexible MFCs/MFMs available today.

The Brooks GF40/GF80 Series is the perfect choice for customers who use thermal mass flow controllers or thermal mass flow meters on a variety of gases, who need to change gas type frequently, or who need to re-range while preserving gas measurement and control accuracy. Some examples:

  • OEMs will reduce the number of gas and range-specific MFCs that they inventory
  • Solar, biotech, CVD, plasma, glass, web coating, nanotechnology, vacuum processing and similar large users of mass flow meters and mass flow controllers will greatly reduce their gas- and range-specific spares inventory
  • R&D, research, and laboratory users can quickly change experiment conditions and achieve much better actual process gas accuracy vs. traditional mass flow devices

MultiFlo programming is simple and fast – a new gas and range can be programmed under 60 seconds plus the device can be programmed without removing it from service or disconnecting the device from any process or tool control system.

Product Description

The Brooks GF40/GF80 Series features a corrosion-resistant Hastelloy C-22 sensor for durable, long-term operation. Sub-1 second settling times and 1% of set point accuracy ensure that the GF40/GF80 will provide reliable flow measurement or flow control in demanding gas flow applications. Both GF40 and GF80 achieve excellent internal to external leak integrity for challenging process gases as found in CVD, solar, and other processes. With a wide range of connector types, seal and seat materials, and digital and analog I/O options available, the GF40/GF80 represents an extremely powerful, yet easy, upgrade for existing MFCs or MFMs.

Product Brochure For the full brochure on this product, please click here.
Product Manual For a Manual for this product. Please click here.

Features

Dimensional Drawings

Diagnostic / Service Port

  • Easy diagnostics and troubleshooting
  • Independent of tool communication

Analog and Digital Communication Options

  • RS485 Analog
  • DeviceNet
  • Profibus
  • EtherCAT

Third Generation Fast Response Sensor

  • Excellent long-term stability (<+0.5% F.S/yr.)
  • Improved signal to noise ratio
  • High purge rate capability
  • Lower temperature operation for gases prone to thermal decomposition

Solenoid Control Valve

  • Elastomer or Metal Seals
  • High purge rate capability
  • Normally open or normally closed operation

Temperature Sensor

  • Accurate flow and temperature measurement over full temperature range
  • Real-time compensation for ambient temperature fluctuations enables precise gas chemistry control

Elastomer or Metal Seal

  • Cost performance flexibility for a wide range of applications.

MultiFlo Gas and Range Programmability with Advanced Diagnostics and User Accessible Service Port

  • Select new gas calibrations and full-scale ranges without the trouble and cost of removing the mass flow controller from the gas line. Convenient interface to diagnostics port for maximum uptime.

Corrosion Resistant Hastelloy Sensor

  • Provides unmatched long-term sensor stability ensuring maximum yield and throughput.

Specifications Table

GF40 GF80
Mechanical
Valve Type Normally Closed, Normally Open, No Valve (Meter) Normally Closed, No Valve (Meter)
Primary Wetted Materials 316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS
External Seals Viton, Buna, Kalrez, EPDM or Neoprene Metal/Nickel
Internal Seals/Valve Seat Viton, Buna, Kalrez, EPDM or Neoprene PFA/Kalrez
Ratings
Operating Temperature Range 5-50OC (41-122OF)
Maximum Operating Pressure 150 psig (10 bar)
Design Proof Pressure 4000 psig (275 bar)
Differential Pressure Range 3-860 sccm = 7-45 psid, 861-7200 sccm = 15-45 psid, 7201-50000 sccm = 25-45 psid
Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure
Leak Integrity (External) 1x10-9 atm. cc/sec He 1x10-910 atm. cc/sec He
Performance
Full Scale Flow Range (N2 Eq.) 3 sccm to 50 slm
Flow Accuracy +1% S.P. 35-100%, +0.35% F.S. 2-35%
Repeatability & Reproducibility < + 0.2% S.P.
Linearity + 0.5% F.S. (included in accuracy)
Response  Time (Settling  Time) Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%)
Normally Open Valve < 3 sec (within 2% for steps 0-10 through 0-100%)
Control Range 2-100%
Valve Shut Down < 1% of F.S.
Zero Stability < + 0.5% F.S. per year
Pressure Coefficient 0.03% per psi (0-50psi N2)
Attitude Sensitivity <0.25% span change @ 90O after rezeroing (N2 @ 50 psi)
Auto Zero Optional: (When Auto Zero is enabled the device performs the zero function once every time the set point returns to zero. To accomplish, simply provide a zero set point.)
Auto Shut-Off The Auto Shut-off feature closes the GF0xx valve when the set point drops below 1.5% of full scale
Electrical
Diagnostic / Service Port All variations have an RS485 Diagnostic/Service port via 2.5mm jack
In Rush Current/Power 3.0A/8 Watts
Voltage Setpoint Input Specifications
Nominal Range 0-5 Vdc
Full Range 0-5.5 Vdc
Absolute Max. 25 V (Without damage)
Input Impedence 192 kOhms
Required Maximum Sink Current 0.002 mA
Current Setpoint
Nominal Range 4-20 mA or 0-20 mA
Full Range 0-22 mA
Absolute Max. 25 mA (Without damage)
Input Impedence 125 Ohms
Flow Output (Voltage) Specifications
Nominal Range 0-5 Vdc
Full Range 0-5.5 Vdc
Min. Load Resistance 1 kOhms
Flow Output (Current) Specifications
Nominal Range 4-20 mA or 0-20 mA
Full Range 0-22 mA (@0-20 mA); 3.8-22 mA (@ 4-20 mA)
Max. Load 400 Ohms (for supply voltage: 12V-24V)
RS485/Analog
Digital Communication Protocol S-Protocol (proprietary protocol based on HART command set), A-Protocol, L-Protocol
Electrical Connection 1 x 15-pin Male Sub-D, (A)
Analog I/O 0-5 V, 0-10 V, 0-20 mA, 4-20 mA
Power +12 Vdc to +24 Vdc / normal operation 7 Watt max, Purge 8 Watt
Voltage Setpoint Input Specifications
Nominal Range 0-5 Vdc or 0-10 Vdc
Full Range 0-11 Vdc
Absolute Max. 25 V (Without damage)
Input Impedence 192 kOhms
Required Maximum Sink Current 0.002 mA
Current Setpoint
Nominal Range 4-20 mA or 0-20 mA
Full Range 0-22 mA
Absolute Max. 25 mA (Without damage)
Input Impedence 125 Ohms
Flow Output (Voltage) Specifications
Nominal Range 0-5 Vdc, 0-10 Vdc
Full Range -0.5 - 11 Vdc
Min. Load Resistance 1 kOhms
Flow Output (Current) Specifications
Nominal Range 4-20 mA or 0-20 mA
Full Range 0-22 mA (@0-20 mA); 3.8-22 mA (@ 4-20 mA)
Max. Load 400 Ohms (for supply voltage: 12 V-24 V)
Diagnostics & Display
Status Lights MFC Health, Network Status
Alarms Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic / Service Port RS485 via 2.5mm jack
Compliance
Environmental Compliance CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
RoHS
General, Leak-Test Traceability, Oxygen Cleaning, Calibration Traceability, Material Certification



Build Your Configuration

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