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Fujikin FCST1000(M)F Mass Flow Controllers and Meters

Standard Digital Model. Elastomer and Metal Seal Digital Mass Flow Controllers and Meters


Overview

Fujikin's advanced fluid and gas automatic control equipment, specialized gas control units, ceramic valves, ultra-high precision electrically-actuated needle valves, as well as ultra high purity valves, fittings and mass flow controllers are suitable for use in a wide range of discrete manufacturing and materials equipment and processes.

Fujikin's thermal series Mass Flow Controllers (FCS-T) are designed specifically for semiconductor and solar applications that combines high accuracy, better throughput and reduced system costs.

Specifications Table

FCST1005(M)F/TM1005(M)F
Flow Range (N2 Equivalent) 10, 20, 30, 50, 100, 200, 300, 500 SCCM
Valve Type N/C:Normally Closed
Controlled Volume Range 2% ~ 100% F.S.
Flow Accuracy ±1% F.S. (Accuracy guaranteed between 15~35°C)
Setting Signal 0.1-5VDC
Output Signal Analog 0-5VDC
Communication 0-5VDC, Digital: RS485 (Fujikin Protocol), DeviceNet (SEMI E54 & ODVA SEMI SIG MFC PROFILE)
Repeatability ±0.2% F.S.
Response Time ≤1sec
Required Pressure Difference 50-300kPa
MAX Operating Pressure 400kPaG
Proof Pressure 1MPaG
Guaranteed Operating Temperature Range 5-50°C
External Leak Rate Metal Seal:1 X 10 -11 Pa•m3/sec He, Elastomer Seal:1 X 10-7Pa•m3/sec He
Mounting Orientation Can be mounted in any orientation
Current Consumption +15VDC:25mA, -15VDC:180mA
Wetted Surface Material 316L SS, Magnetic Stainless Steel, PTFE, Fluoro-Rubber (Chloroprene Rubber)
Seal Material Metal Seal: SUS316L,
Elastomer Seal:Fluoro-Rubber (Chloropene Rubber)
Actuator Type Solenoid actuator
Surface Finish None

Ordering Table

Type Description Seal Flow
Range
Connections Part No Price Add
Item
Type Description Seal Flow
Range
Connections Part No Price Add
Item
N2
Mass Flow Controller
Elastomer
10 sccm
1/4" VCR
FC-F10N2-233
P.O.R.
N2
Mass Flow Controller
Elastomer
20 sccm
1/4" VCR
FC-F20N2-233
P.O.R.
N2
Mass Flow Controller
Elastomer
30 sccm
1/4" VCR
FC-F30N2-233
P.O.R.
N2
Mass Flow Controller
Elastomer
50 sccm
1/4" VCR
FC-F50N2-233
P.O.R.
N2
Mass Flow Controller
Elastomer
100 sccm
1/4" VCR
FC-F100N2-233
P.O.R.
N2
Mass Flow Controller
Elastomer
200 sccm
1/4" VCR
FC-F200N2-233
P.O.R.
N2
Mass Flow Controller
Elastomer
300 sccm
1/4" VCR
FC-F300N2-233
P.O.R.
N2
Mass Flow Controller
Elastomer
500 sccm
1/4" VCR
FC-F500N2-233
P.O.R.
N2
Mass Flow Controller
Metal
10 sccm
1/4" VCR
FCM-F10N2-233
P.O.R.
N2
Mass Flow Controller
Metal
20 sccm
1/4" VCR
FCM-F20N2-233
P.O.R.
N2
Mass Flow Controller
Metal
30 sccm
1/4" VCR
FCM-F30N2-233
P.O.R.
N2
Mass Flow Controller
Metal
50 sccm
1/4" VCR
FCM-F50N2-233
P.O.R.
N2
Mass Flow Controller
Metal
100 sccm
1/4" VCR
FCM-F100N2-233
P.O.R.
N2
Mass Flow Controller
Metal
200 sccm
1/4" VCR
FCM-F200N2-233
P.O.R.
N2
Mass Flow Controller
Metal
300 sccm
1/4" VCR
FCM-F300N2-233
P.O.R.
N2
Mass Flow Controller
Metal
500 sccm
1/4" VCR
FCM-F500N2-233
P.O.R.

Accessories Table

Description Part No Price Add
Item
Description Part No Price Add
Item
AC Cable
Length: 2m
FCPT1200-AC-2M
P.O.R.
Power supply with display
FCS-PM1000A-SP
P.O.R.
Power supply for 3 units
FCS-T1000-PS3
P.O.R.
Power supply for 6 units
FCS-T1000-PS6
P.O.R.
Power supply for 9 units
FCS-T1000-PS9
P.O.R.
Cable between MFC and Power Supply with display Length: 3m, 9 Pin to 9 Pin
T1000-9X9-3M
P.O.R.
Cable between MFC and Power Supply with display Length: 1m, 9 Pin to 15 Pin
 
T1200-9X15-1M
P.O.R.
Cable between MFC and Power Supply with display Length: 3m, 9 Pin to 15 Pin
 
T1200-9X15-3M
P.O.R.
Cable between MFC and Power Supply with display Length: 5m, 9 Pin to 15 Pin
Length: 5m, 9 Pin to 15 Pin
T1200-9X15-5M
P.O.R.

 

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