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MKS® GM100A Digital Mass Flow Controller

Multi-gas, multi-range, metal sealed, digital mass flow controller for rates up to 100 slm

Product Downloads
For a download of the product datasheet, click here.

For a download of the product manual, click here.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.
Warning Notes: If gases other than the calibrated gas are used, the user is responsible for ensuring seal material compatibility.

Please note that while the wetted seals within the MFC are metal, there is one PTFE seal within the valve which may cause slight fluctuations at 10 sccm or lower.

Start Your Configuration

MKS GM100A Digital Mass Flow Controller

1. Series: Type MFC Mass Flow Controller GM100A {GM100A}
2. Gas:
3. Flow Range Full Scale:
4. Fittings :
5. Connector:
6. Valve/Device Type:
7. Reserved: Reserved {0}
8. Firmware: MKS will ship current firmware. If something else is needed, please contact KJLC. {20}

Accessories Table

Description Part No Price Add
Description Part No Price Add
246C Single Channel Display, Power Supply / Readout
247D 4 Channel Sequential Display, Power Supply / Readout
15 Pin Sub-D 3-meter cable
9 Pin Sub-D 3-meter cable


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