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Process Equipment > Deposition Monitors & Controllers

INFICON Feedthrough Selection

The following vacuum feedthroughs are compatible with all INFICON Quartz Crystal Deposition Controllers. Each feedthrough provides coaxial electrical connections and tubing for air or water connections. One feedthrough type is required for each sensor installation. Choose the appropriate feedthroughs in conjunction with your vacuum mounting ports and sensor types.

NOTE:

  • Air and water lines 3/16 inch (0.48cm) O.D. Two electrical connections are required for the Dual Sensor Head.
  • All shutter sensors require appropriate Feedthrough and control valve (750-420-G1).
  • Feedthrough configuration varies depending on options selected (Front Load or Cool Drawer, type of feedthrough, and connection). Example: SL-A0E37 uses feedthrough p/n 002-042 while SL-A1E37 uses feedthrough p/n 750-030-G1. CDD-AF40, -AF47, -BF40, and -BF47 use a 2-piece hybrid feedthrough design due to dimensional limits of a standard CF40.

Ordering Table

Description Mounting Compatible
Sensor(s)
Part No Price Add
Item
Description Mounting Compatible
Sensor(s)
Part No Price Add
Item
Contains one coaxial
Two tube connections (Fluorocarbon o-ring)
1 in. (2.54cm)
Bolt Hole
Front Load only
002-042
P.O.R.
Contains one coaxial
Two tube connections
with Ultratorr (Fluorocarbon o-ring)
1 in. (2.54cm)
Bolt Hole
Front Load only
750-624-G1
P.O.R.
Contains one coaxial
Three tube connections (Fluorocarbon o-ring)
1 in. (2.54cm)
Bolt Hole
Front Load only
750-030-G1
P.O.R.
Contains one coaxial
Two tube connections (copper gasket)
2-3/4 in.
(NW35 CF)
Conflat Flange
Front Load only
002-043
P.O.R.
Contains two coaxial
Three tube connections (copper gasket)
2-3/4 in.
(NW35 CF)
Conflat Flange
Front Load only
002-080
P.O.R.
Contains one coaxial
Two tube connections
with Ultratorr (copper gasket)
2-3/4 in.
(NW35 CF)
Conflat Flange
Front Load only
206-878-G2
P.O.R.
Contains two coaxial
Three tube connections
with Ultratorr (copper gasket)
2-3/4 in.
(NW35 CF)
Conflat Flange
Front Load only
206-890-G2
P.O.R.
Contains one coaxial
Two water and two air tube connections
(copper gasket)
2-3/4 in.
(NW35 CF)
Conflat Flange
Front Load only
750-683-G1
P.O.R.
Contains one coaxial
Three tube connections (copper gasket)
2-3/4 in.
(NW35 CF)
Conflat Flange
Front Load only
750-685-G1
P.O.R.
Contains one coaxial
Three tube connections
with Ultratorr (copper gasket)
2-3/4 in.
(NW35 CF)
Conflat Flange
Front Load only
750-685-G2
P.O.R.
Contains one coaxial
Three tube connections (Fluorocarbon o-ring)
KF40 Flange
N/A
130239
P.O.R.
Contains one coaxial
Two tube connections (Fluorocarbon o-ring)
KF40 Flange
N/A
130246
P.O.R.

Contact international@lesker.com for more information, including pricing and all feedthrough options, and to discuss your specific process application requirements.

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