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Pulsed DC Sputtering Power Supplies

AE Pinnacle Plus+ Series

Advanced Energy’s Pinnacle Plus+ power supply provides all of the advantages of a pulsed-DC solution for your reactive processes— in a one-box package that delivers additional benefits in the form of ease of use, cost savings, and superior flexibility. Combining standard DC technology and process-proven pulsed-DC technology patented by AE in the 1990s, the Pinnacle Plus+ power supply provides higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions. The Pinnacle Plus+ product line consists of single-output 5kW and 10kW models, as well as a dual-output 5kW model.

Features:

  • Compact package
  • Adjustable frequency range from 5 kHz to 350 kHz
  • Variable duty cycle up to 45%
  • Wide voltage and impedance ranges (single-tap)
  • Superior arc control
  • Dual output for multichamber use
  • Reactive sputtering closed-loop control
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Model Input Voltage Recommended
Sputter Source
Part No Price Add
Item
Model Input Voltage Recommended
Sputter Source
Part No Price Add
Item
1kW DC Pulsed Power Supply
208 VAC
TORUS® Sources (1", 2", & 3")
2018265-1A
P.O.R.
2kW DC Pulsed Power Supply
208 VAC
TORUS® Sources (1", 2", 3" & 4")
2018265-2A
P.O.R.
Pinnacle Plus 10kW DC Power Supply
115 VAC
TORUS® Production Sources (TORUS 7 & Linear)
EJPINN10KPLS
$26,635.00
Pinnacle Plus 5kW DC Power Supply
115 VAC
TORUS® Production Sources (TORUS 6 & TORUS 7)
EJPINN5KPLS
P.O.R.

Contact international@lesker.com or 1-412-387-9200 for more information, including pricing and options, and to discuss your specific process application requirements.

 

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