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KJLC R-Series RF Power Generator Packages

R-Series RF generator packages provide reliable power for Magnetron Sputtering, Plasma Generation, & RF Biasing to meet your process requirements. Packages include all parts of a typical RF network, complete with necessary inter-unit and Torus Sputtering Cathode cabling as well as rack mounting kits.

Features:

  • Generator, Matching Network, and Controller Included
  • CE Marked Compliance
  • Microprocessor-Controlled, Solid-State Construction
  • Electronics Constructed to Minimize VSWR Conditions
  • Programmable High-Speed Pulsing
  • Automatic Gain Control
  • Programmable Presets
  • DC Probe Input
  • High Voltage Variable Capacitors
  • Displays Forward Power, Reflected Power, and DC Bias
  • Analog or Serial Interface
  • Low Loss Design
  • Auto/Manual Operation

Control modes to regulate power output:

  • DC Voltage
  • RF Voltage
  • Forward Power Leveling
  • Load Power Leveling

Dimensional Drawings


Specifications Table – Matching Network

Model300W Matching Network600W Matching Network
Power Output300 Watts600 Watts
Weight10 lbs. (4.53 kg)10 lbs. (4.53 kg)
Dimensions5" H x 9" W x 15" D5" H x 9" W x 15" D
Output Impedance1.5 to 35 Ohms
-100 to +75 Ohms
1.5 to 35 Ohms
-100 to +75 Ohms
Input ConnectorType "N" FemaleType "N" Female
Output ConnectorType "HN" FemaleType "HN" Female
CoolingConvection/AirConvection/Air

Specifications Table – Matching Network Controller

Model300W/600W Controller
Input Power98-125/196-250 VAC Selectable 47-63 Hz
Dimensions3.5" H x 9.5" W x 12.8" D

Specifications Table – RF Generator

Model300W Generator600W Generator
Power OutputHigh Range: 0–300 WattsHigh Range: 0–600 Watts
Input Power90–125V or 190–264V, 1P
47–63 Hz, (Factory Configured)
90–125V or 190–264V, 1P
47–63 Hz, (Factory Configured)
Frequency13.56 MHz, (Fixed)13.56 MHz, (Fixed)
Weight27 lbs. (12.2 kg)37 lbs. (16.8 kg)
Dimensions5.25" H x 9.50" W x 18.35" D
W = 8.00" (w/o Rackmount Kit)
7.00" H x 9.50" W x 18.38" D
W = 8.00" (w/o Rackmount Kit)
Output Impedance50 Ohms, ± 5 Ohms
Nominal
50 Ohms, ± 5 Ohms
Nominal
Interface ConnectorSerial: DB-9 Female
Analog: DB-25 Female
CEX: Female BNC
Serial: DB-9 Female
Analog: DB-25 Female
CEX: Female BNC
CoolingForced Air, 110 CFMForced Air, 110 CFM
Metering Accuracy± 1% Full Scale
± 3% of Reading
± 1% Full Scale
± 3% of Reading
Output Power Stability± 0.5% Long Term± 0.5% Long Term
± 1Watt
Harmonics-50 dBc-50 dBc
Pulsing0–1KHz, 1-Hz Steps
50 micro-sec Minimum Pulse
0–1KHz, 1-Hz Steps
50 micro-sec Minimum Pulse

KJLC® Research
Advantage Packages
The KJLC RAP program offers the ability to build a magnetron and power supply package ideal for your application. Click here to build your package and save up to 30%.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Type Description Part No Price Add
Item
Type Description Part No Price Add
Item
Complete R-Series Power Supply Packages
R301 300W Power Supply Package (120 VAC), Auto-Match
RF03A12XX300
$9,335.00
Complete R-Series Power Supply Packages
R301 300W Power Supply Package (220 VAC), Auto-Match
RF03A22XX300
$9,335.00
Complete R-Series Power Supply Packages
R601 600W Power Supply Package (220 VAC), Auto-Match
RF06A22XX300
$12,985.00

Contact sales@lesker.com for more information, including pricing and options, and to discuss your specific process application requirements.

 

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