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EpiCentre Deposition Stages


Sample Manipulation & Motion Sample Manipulation and Motion > EpiCentre Deposition Stages

Range Overview

EC-I Series
EC-I Series
EC-R Series
EC-R Series
GLAD Series
GLAD Series
An 'in-line' design presenting the substrate parallel to the mounting flange. The EC-I series provides substrate heating with a number of proven modular options offering substrate rotation, electrical biasing and axial translations to set the substrate height and to facilitate substrate transfer. The modular approach allows end users to select features including the substrate size, amount of axial translation required, the size and type of mounting flange and the operating height. A 'right-angle' design presenting the substrate at 90° to the mounting flange. The EC-R provides substrate rotation, heating and electrical biasing. The two axes of rotation provide continuous azimuthal rotation and ± 180° tilt for substrate orientation. The stage may be mounted in any orientation. The EC-R can also be configured specifically as a retrofit instrument for MBE systems such as the VG Semicon V80H. An in-line 'glancing-angle' design presenting the substrate at a variable glancing angle to the mounting flange. The GLAD (GLancing Angle Deposition) stage is creating great interest in the field of three-dimensional engineered nanostructures. The GLAD stage is suitable for use with all the usual directional deposition sources, e.g.
  • Thermal Evaporation
  • Physical Vapor Deposition
  • Pulsed Laser Deposition
  • Magnetron Sputtering

The EpiCentre range of deposition stages employs cutting edge design and engineering to give high temperature substrate heating and manipulation under true UHV conditions. EpiCentres have been designed for deposition applications such as MBE (Molecular Beam Epitaxy), sputtering and CVD (Chemical Vapour Deposition). Substrate annealing, degassing and other high temperature material modifications can also be performed.

EpiCentres can be mounted in any orientation to suit customer chamber designs and application configurations.

The EpiCentre range has been used by pioneering research laboratories around the world for many years. End user references are available for a variety of applications and substrate sizes. The range comprises three model types: EC-I, EC-R and GLAD.

For a listing of Frequently Asked Questions (FAQs) about Manipulation & Motion please see this link: Manipulation & Motion FAQ.

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