|Standard Travel LSM & HLSM Series||Long Travel HLSML Series||Compact CLSM Series||Tilt LSMT Series||X-Shift LSMX Series|
|This is the most comprehensive series, offering a multitude of flange sizes, strokes up to 350mm, and actuation options||The Long Travel series includes an upgraded structure enabling up to 1m of stroke||The Compact series has the shortest flange-to-flange dimension, offered with a variety of flange sizes and stroke||The Tilt series provides the ability to tilt the traveling flange by ±2° to allow final adjustment of the driven load||The X-Travel series provides the ability to laterally adjust the traveling flange by ±5mm for final adjustment of the driven load|
The Linear Shift Mechanism range is possibly the largest of its type on the market with over 500 variations. To simplify selection, the range is divided into five standard series to suit the majority of applications & include travel up to 1 meter. It is also possible to adjust the axis of motion along the X axis and to "tilt" the traveling flange for final alignment. The following sections contain detailed specifications, options and dimensional drawings for each series.
Linear Shift Mechanisms (linear translators) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style wafer applications. Fully bakeable to 250°C, the range is supplied on CF flanges and provides true UHV performance.
The bellows sealed Linear Shift Mechanisms provide smooth, precise motion via a kinematically-designed external leadscrew driven mechanism complete with anti-rotation and anti-deflection systems. This design ensures smooth and precise motion along the Z axis. The range has a high load capability ensured through its rigid construction.
The bellows are manufactured from 316L stainless steel as standard and offer a minimum design life of 10,000 cycles. Customized units are available offering a design life of up to 1 million cycles
For a listing of Frequently Asked Questions (FAQs) about Manipulation & Motion please see this link: Manipulation & Motion FAQ.