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Sample Manipulation and Motion > Rotary Motion > Ferro-Magnetic Solid Shafts > 
CF Flanged Solid Shaft – Ferrotec, Ferro-Magnetic Fluid Rotary Feedthroughs


CF Flanged Solid Shaft – Ferrotec, Ferro-Magnetic Fluid Rotary Feedthroughs

Designed to provide rotary motion under high vacuum, these ferrofluid feedthroughs have ConFlat-compatible (CF) mounting flanges. Normal helium leak detectors capable of detecting 1 x 10-11 std cc/sec of Helium flow detect no leakage for CF mounts under static and dynamic testing. CF flanged rotary motion feedthroughs routinely operate in the 10-6 torr range and, when properly prepared & installed, may be used to mid 10-10 torr. ConFlat® Compatible (CF) Mounting Flanges

Ferrofluid Feedthrough Features

  • Use a special magnetic fluid (ferrofluid) in place of an o-ring seal around dynamic parts
  • Fluid hermetically seals the shaft making a liquid o-ring while a permanent magnet keeps the fluid in place
  • Ferrofluid magnetically held in stages formed by grooves machined into either the shaft or pole pieces
  • Unlike regular o-rings, the ferrofluid o-ring remains intact for years of operation despite the shaft’s motion

Applications

  • Rotary stages
  • Barrels
  • Platens
  • Planetaries
  • Web coater rollers used in thin film deposition and etching processes
Product Brochure For a Brochure for this product. Please click here.


Ordering Table

Bearings Shaft O.D. Mount
Flange
Water
Cooled
PartNo Price Add To
Cart
Bearings Shaft O.D. Mount
Flange
Water
Cooled
PartNo Price Add To
Cart
Radial/SS
0.375" (9.5 mm)
2.75" CF
No
FE103154 $910.00
R4/SS
0.25" (6.35 mm)
2.75" CF
Yes
(1.14", 1.87")
FE103501 P.O.R.
R4/SS
0.25" (6.35 mm)
2.75" CF
No
FE103532 $830.00
R8/SS
0.50" (12.7 mm)
2.75" CF
No
FE103909 $1,095.00
R6/SS
0.375" (9.5 mm)
2.75" CF
Yes
(1.07", 1.24")
FE103912 $1,010.00
R4/SS
0.25" (6.35 mm)
1.33" CF
No
FE103915 $830.00
6800/SS
0.375" (9.5 mm)
2.75" CF
No
FE121060 $1,600.00
6800/SS
0.375" (9.5 mm)
2.75" CF
Yes
(0.75")
FE121099 P.O.R.

NOTE: * Shaft mount measured 1" from process side face of feedthrough.

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