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Sample Manipulation and Motion > Rotary Motion > Ferro-Magnetic Solid Shafts > 
O-Ring Flanged Solid Shaft – Ferrotec, Ferro-Magnetic Fluid Rotary Feedthroughs


O-Ring Flanged Solid Shaft – Ferrotec, Ferro-Magnetic Fluid Rotary Feedthroughs

These Ferrofluidic® rotary drives are designed for high vacuum applications where the chamber port has a flat, polished outer surface suitable for seating an o-ring surrounding a hole through the vacuum wall. Each feedthrough has a fluorocarbon o-ring installed in the flange. The flanges do not correspond to standard vacuum industry flange systems, however, the dimension table provides the information needed to mate to the chamber. Alternatively, we can supply an adapter spool piece to mate any feedthrough to a vacuum flange.

Ferrofluid Feedthrough Features

  • Use a special magnetic fluid (ferrofluid) in place of an o-ring seal around dynamic parts
  • Fluid hermetically seals the shaft making a liquid o-ring while a permanent magnet keeps the fluid in place
  • Ferrofluid magnetically held in stages formed by grooves machined into either the shaft or pole pieces
  • Unlike regular o-rings, the ferrofluid o-ring remains intact for years of operation despite the shaft’s motion

Applications

  • Rotary stages
  • Barrels
  • Platens
  • Planetaries
  • Web coater rollers used in thin film deposition and etching processes
Product Brochure For a Brochure for this product. Please click here.

Dimensional Drawings


Ordering Table

Bearings Shaft O.D. Mount
Flange
Water
Cooled
Face
Oring
PartNo Price Add To
Cart
Bearings Shaft O.D. Mount
Flange
Water
Cooled
Face
Oring
PartNo Price Add To
Cart
R8/SS
0.50" (12.7 mm)
6.00" Flange O.D.
Yes
(0.5", 1.74")
O-V234
FE103182 $1,510.00
R8/SS
0.50" (12.7 mm)
6.00" Flange O.D.
No
O-V234
FE103244 $1,320.00
R12/SS
0.75" (19 mm)
6.00" Flange O.D.
No
O-V234
FE103246 $2,265.00
Ang. Cont/BS
1.687" (42.85 mm)
7.00" Flange O.D.
Yes
(2.25", 1.5")
O-V351
FE103328 P.O.R.
Ang. Cont/BS
0.50" (12.7 mm)
7.00" Flange O.D.
Yes
(2.25", 1.5")
O-V351
FE103329 P.O.R.
7305/BS
0.75" (19 mm)
5.00" Flange O.D.
Yes
(1.58", 1.54")
O-V337
FE103904 $4,410.00
Ang. Cont/BS
1.00" (25.4 mm)
6.00" Flange O.D.
Yes
(1.72", 1.54")
O-V340
FE104259 P.O.R.

NOTE: * Shaft mount measured 1" from process side face of feedthrough.

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