Pre-Assembled Radial Distribution Center (RDC) 48
Our RDC 48 Radial Distribution Center features a 23" arm extension and is rated for UHV applications. Also included is an optional bakeout tent assembly with heaters totaling 2kW. The RDC48 (as shown) is in stock and available for immediate shipment worldwide.
This RDC facilitates multi-chamber in-vacuum substrate transfer - ideal for cluster tool environments. The RDC is mounted at the center of a series of chambers, acting as a central hub from which sample transfer occurs. A linear rack and pinion sample transporter, controlled via a rotary drive, moves and indexes the sample about its center axis between chambers through shared ports.
Features
Vessel:
- 48" inside diameter vessel, 304L stainless steel construction
- Quantity (4) radial 8" CF transfer ports
- 4 ½" CF ports above each radial port
- 8" CF bottom pumping port
- 8 off 2 ¾" CF ports for gauging, instrumentation, etc.
- Aluminum stand, includes swivel casters and leveling feet
Transfer Mechanism:
- UHV compatible transfer mechanism
- 23" arm extension from flange face to end of customer's platen stand
- Rotary feedthrough rotates rack 360 degrees to desired transfer port
- Rotary feed through extends and retracts gear rack
- 25mm Z-shift raises or lowers gear rack to assist in transfer
- One (1) set of forks to transfer 4"(100 mm) diameter substrate
Bake out Tent:
- Custom-fit insulated bake out tent fitted to RDC assembly
- Aluminum frame supports tent
- Quantity (4) 500 watt ceramic heaters provide bake out to 150 degrees Celsius (power supply and control not included)
| Model | Part Number | Price (USA) |
| Radial Distribution Center 48 | RDC48 | $72,500.00 |
Further Information:
Please contact Mark Mattis for more information.
Product Drawings:
Click on a thumbnail image to open a high detail PDF drawling in a new window.
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Drawling one of RDC 48 |
Drawling two of RDC 48 |