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Sample Manipulation & Motion


Y, XY, & XYZ Motion

Introduction to Multi-Axis Manipulation Linear Displacement Mechanism: Y-Motion
Introduction to Multi-Axis Manipulation Linear Displacement Mechanism: Y-Motion
New to Multi-Axis manipulation? Get a brief overview of your choices and some basic terminology here. A single axis manipulator stage having two parallel conflat flanges connected by bellows. One flange is fixed and connects to the vacuum chamber with the other flange moveable in one direction. A typical use for Y motion is for mounting a transfer arm on the traveling flange that can be moved up and down to unload substrates onto another stage. Manual and motorized versions available.
MultiBase: XY-Motion Rotatable Axis MultiBase: XY-Motion
MultiBase: XY-Motion Rotatable Axis MultiBase: XY-Motion
A precision two axis manipulator stage having two parallel conflat flanges connected by bellows. One flange is fixed and connects to the vacuum chamber with the other flange moveable in 2 directions. A typical use for XY motion is for mounting substrates that require precise motion in both directions for focusing and positioning. Manual and motorized versions available. A precision two axis manipulator stage having two parallel conflat flanges connected by bellows. One flange is fixed and connects to the vacuum chamber with the other flange moveable in 2 directions. This differs from the standard XY motion by having the XY control mechanism capable of rotating around the fixed flange to orientate XY motion in any position. This feature makes it easier to position substrates for focusing and positioning by aligning the XY in the direction of required travel rather than moving both X and Y. Manual and motorized versions available.
MultiStage Platform: XYZ-Motion MultiMotion TETRAXE: XYZ + Tilt
MultiStage Platform: XYZ-Motion MultiMotion TETRAXE: XYZ + Tilt
A precision three axis manipulator stage having an XY motion stage with an additional Z motion mounted to the XY traveling flange. This type of MultiMotion stage uses a two bellows design giving a larger diameter through the bellows allowing for greater XY and Z motions. A typical use for XYZ motion is for mounting substrates that require precise motion in 3 directions for focusing and positioning. Manual and motorized versions available. The newly redesigned XYZT allows for precision motion of XYZ with the additional feature of tilt of the mounting flange. This tilt feature can be adjusted to ensure that the manipulator is in the correct alignment which is sometimes an issue if the chamber flange is not square. This type of MultiMotion manipulator uses a two bellows design giving a larger diameter through the bellows allowing for greater XY and Z motions. A typical use for XYZ motion is for mounting substrates that require precise motion in 3 dimensions for focusing and positioning. Manual and motorized versions available.

Many vacuum applications such as sample transfer, beamline diagnostic positioning and sample positioning for analysis require precise manipulation along Y or XYZ axes.

UHV Design provides a field-proven range of precise manipulators that can be used in isolation or combined with linear shift mechanisms and magnetically coupled rotary drives to build sophisticated manipulators with up to six axes of independent motion.

All of our manipulators benefit from kinematic design which ensures smooth, precise motion, high load capability and a minimum bellows design life of 10,000 cycles.

Manipulators can be configured using our modular XY in combination with linear shift mechanism (XYZ) and XYZT stages. Options include:

  • Bellows support tubes
  • Service collars
  • Rotary drives providing up to 2 additional axes of manipulation

In addition to this modular approach we provide complete sample manipulation solutions which include sample heating, cooling and rotation.

For a listing of Frequently Asked Questions (FAQs) about Manipulation & Motion please see this link: Manipulation & Motion FAQ.

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