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System Sub-Assemblies & Components > Load Locks

Cylindrical Series Load Lock Vessels

Available in stainless steel or aluminum.

Features

  • Machined from bar stock
  • Weld-Free Construction

* For accessory products, please click.

Dimensional Drawings

Ordering Table

Type Actual
Wafer Size
Reference
Wafer Size
Mounting
Flange
Vessel I.D.* Pumping Port Linear Motion
Translator Port
Utility Ports PartNo Price Add To Cart
VacuCADSM
Aluminum Cylindrical LL Series
76.2 mm
3"
6" CF
3.50" x 1.50"
ISO63-K
4-1/2" CF
KF25
LLC-CYLD3A P.O.R.
N/A
Stainless Cylindrical LL Series
76.2 mm
3"
6" CF
3.50" x 1.50"
ISO63-K
4-1/2" CF
KF25
LLC-CYLD3S P.O.R.
N/A

* Vessel I.D. does not include gate valve.

ISO:9001-2008 The Kurt J. Lesker Company is an ISO:9001-2008 certified company. Copyright ©1996-2014 Kurt J. Lesker Company® All rights reserved.