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System Sub-Assemblies & Components > Load Locks

Planar Series Load Lock Vessels

Ideally suited for single substrate transfer.

Features

  • Rectangular, low-profile design
  • Can transfer wafers up to 150mm

* For accessory products, please click.

Dimensional Drawings

Ordering Table

Type Actual
Wafer Size
Reference
Wafer Size
Mounting
Flange
Vessel I.D.* Pumping Port Linear Motion
Translator Port
Utility Ports PartNo Price Add To Cart
VacuCADSM
Planar LL Series
100 mm
4"
8" CF
5.88" x 2.63"
ISO63-K
4-1/2" CF
KF25, KF16
LLC-PLNR4 $3,230.00
N/A
Planar LL Series
150 mm
6"
10" CF
7.75" x 2.75"
ISO63-K
4-1/2" CF
KF25, KF16
LLC-PLNR6 $3,990.00
N/A

* Vessel I.D. does not include gate valve.

ISO:9001-2008 The Kurt J. Lesker Company is an ISO:9001-2008 certified company. Copyright ©1996-2014 Kurt J. Lesker Company® All rights reserved.