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System Sub-Assemblies & Components > Vacuum Distribution Systems

QDV 450 - Substrate Distribution Vessel


  • The QDV 450 facilitates multichamber in-vacuum substrate transfer–ideal for R&D cluster tool environments.
  • The QDV 450 can also function as an entry lock


  • All aluminum vessel construction
  • Stand alone framework
  • Turbomolecular pumping
  • Accommodates up to 6" (150 mm) diameter substrates
  • Motorized rotary/linear substrate slide mechanism with precision guide way system
  • MESC-SEMI rectangular ports
  • User select semi-automation


  • External dedicated load lock chamber
  • External single or multi wafer storage
Product Manual For a Manual for this product. Please click here.

Specifications Table

Number of Transfer Ports4
Transfer MechanismPrecision Guideway Rail System
Mechanism ControlSemi-automated DC Servo Motor Activated
Cycle Time300 sec
Substrate Size (max)6'' (150 mm) Diameter or Square
(vessel center to transfer fork center)
35'' (889 mm) with 6'' Transfer Forks
Transfer Height (from floor)44'' (1118 mm)
Z-axis (vertical)None
Payload1 lb (454 g)
Internal Wafer StorageNo
Load Lock CompatibleYes
Vacuum Pumping285 l/sec Turbo Pump with Dry Backing Pump
Base Pressure (CDE)5 X 10-7 Torr
System ControlPC-Based Control System (Windows XP)
Available CertificationsNRTL, CSA, CE
Overall Dim (approx)32'' X 32'' X 69'' high (813 mm X 813 mm X 1752 mm)
Weight (approx)1200 lbs (544 kg)

Dimensional Drawings

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