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Gas (Per Semi Standard E52-0703) Listing


SEMI E52-0703 - Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers.

Code Name Symbol
Code Name Symbol
0001
Helium
He
0002
Neon
Ne
0003
Radon
Rn
0004
Argon
Ar
0005
Krypton
Kr
0006
Xenon
Xe
0007
Hydrogen
H2
0008
Air
Air
0009
Carbon Monoxide
CO
0010
Hydrogen Bromide
HBr
0011
Hydrogen Chloride
HCl
0012
Hydrogen Fluoride
HF
0013
Nitrogen
N2
0014
Deuterium
D2
0015
Oxygen
O2
0016
Nitric Oxide
NO
0017
Hydrogen Iodide
HI
0018
Fluorine
F2
0019
Chlorine
Cl2
0020
Water Vapor
H2O
0021
Bromine
Br2
0022
Hydrogen Sulfide
H2S
0023
Hydrogen Selenide
H2Se
0024
Hydrogen Cyanide
HCN
0025
Carbon Dioxide
CO2
0026
Nitrogen Dioxide
NO2
0027
Nitrous Oxide
N2O
0028
Methane
CH4
0029
Ammonia
NH3
0030
Ozone
O3
0031
Phosphine
PH3
0032
Sulfur Dioxide
SO2
0033
Methyl Fluoride
CH3F
0034
Carbonyl Sulfide
COS
0035
Arsine
AsH3
0036
Methyl Chloride
CH3Cl
0037
Cyanogen Chloride
ClCN
0038
Ethylene
C2H4
0039
Silane
SiH4
0040
Carbon Disulfide
CS2
0041
Oxygen Difluoride
OF2
0042
Acetylene
C2H2
0043
Germane
GeH4
0044
Methyl Bromide
CH3Br
0045
Ethylene Oxide
C2H4O
0046
Carbonyl Fluoride
CF2O
0047
Methyl Mercaptan
CH4S
0048
Boron Trifluoride
BF3
0049
Fluoroform
CHF3
0050
Hydrazine
N2H4
0051
Vinyl Fluoride
C2H3F
0052
Methylamine
CH5N
0053
Nitrogen Trifluoride
NF3
0054
Ethane
C2H6
0055
Vinyl Chloride
C2H3Cl
0056
Vinyl Bromide
C2H3Br
0057
Chlorodifluoromethane
CHClF2
0058
Diborane
B2H6
0059
Cyanogen
C2N2
0060
Phosgene
CCl2O
0061
Cyclopropane
C3H6
0062
Phosphorus Trifluoride
PF3
0063
Carbon Tetrafluoride
CF4
0064
Difluoroethylene
C2H2F2
0065
Dichlorofluoromethane
CHCl2F
0066
Allene
C3H4
0067
Dichlorosilane
SiH2Cl2
0068
Methyl Acetylene
C3H4
0069
Propylene
C3H6
0070
Boron Trichloride
BCl3
0071
Chloroform
CHCl3
0072
Perchloryl Fluoride
ClO3F
0073
Dimethyl Ether
C2H6O
0074
Chlorotrifluoromethane
CClF3
0075
Ethyl Chloride
C2H5Cl
0076
Bromine Trifluoride
BrF3
0077
Chlorine Trifluoride
ClF3
0078
Nitrogen Trioxide
N2O3
0079
Boron Tribromide
BBr3
0080
Bromotrifluoromethane
CBrF3
0081
Methyl Vinyl Ether
C3H6O
0082
Difluoroethane
C2H4F2
0083
Tribromomethane
CHBr3
0084
Dichlorodifluoromethane
CCl2F2
0085
Dimethylamine
C2H7N
0086
Sulfur Tetrafluoride
SF4
0087
Sulfuryl Fluoride
SO2F2
0088
Silicon Tetrafluoride
SiF4
0089
Propane
C3H8
0090
Intentionaly Left Blank
0091
Trichlorofluoromethane
CCl3F
0092
Intentionaly Left Blank
0093
Ethyl Acetylene
C4H6
0094
Tetrafluorethylene
C2F4
0095
Nitrogen Tetroxide
N2O4
0096
Arsenic Pentafluoride
AsF5
0097
Disilane
Si2H6
0098
Transbutene
C4H8
0099
Germanium Tetrafluoride
GeF4
0100
Butadiene
C4H6
0101
Carbon Tetrachloride
CCl4
0102
Phosphorous Oxychloride
POCl3
0103
Difluorochloroethane
C2H3ClF2
0104
Butene
C4H8
0105
Bromotrifluoroethylene
C2BrF3
0106
Isobutene
C4H8
0107
Cisbutene
C4H8
0108
Silicon Tetrachloride
SiCl4
0109
Trimethylamine
C3H9N
0110
Sulfur Hexafluoride
SF6
0111
Isobutane
C4H10
0112
Trichloroethane
C2H3Cl3
0113
Germanium Tetrachloride
GeCl4
0114
Titanium Tetrachloride
TiCl4
0115
Iodine Pentafluoride
IF5
Code Name Symbol
Code Name Symbol
0116
Bromine Pentafluoride
BrF5
0117
Butane
C4H10
0118
Hexafluoroethane
C2F6
0119
Chloropentafluoroethane
C2ClF5
0120
Methylbutene
C5H10
0121
Tungsten Hexafluoride
WF6
0122
Dimethylpropane
C5H12
0123
Uranium Hexafluoride
UF6
0124
Molybdenum Hexafluoride
MoF6
0125
Dichlorotetrafluoroethane
C2Cl2F4
0126
Trichlorotrifluoroethane
C2Cl3F3
0127
Hexane
C6H14
0128
Perfluoropropane
C3F8
0129
Octafluorocyclobutane
C4F8
0130
Dibromotetrafluorethane
C2Br2F4
0131
Trimethoxyborine
C3H9BO3
0132
Trimethylphosphorous
C3H9P
0133
Trimethylphosphite
C3H9PO3
0134
Difluorosilane
SiH2F2
0135
Dimethylzinc
C2H6Zn
0136
Ethanol
C2H6O
0137
Halothane
C2HBrClF3
0138
Hexafluoropropylene
C3F6
0139
Hexamethyldisilane
C6H18Si2
0140
Nickel Carbonyl
C4O4Ni
0141
Nitrosyl Chloride
NOCl
0142
Pentaborane
B5H9
0143
Phosphorus Pentafluoride
PF5
0144
Tetraethoxysilane
C8H20O4Si
0145
Tin Tetrachloride
SnCl4
0146
Tributylaluminum
C12H27Al
0147
Trichlorosilane
SiHCl3
0148
Triethylgallium
C6H15Ga
0149
Trimethylaluminum
C3H9Al
0150
Trimethylantimony
C3H9Sb
0151
Trimethylarsenic
C3H9As
0152
Trimethylgallium
C3H9Ga
0153
Trimethylindium
C3H9In
0154
Diethylsilane
C4H12Si
0155
Pentafluoroethane
C2HF5
0156
Tetrafluoroethane
C2H2F4
0157
Tetrafluorohydrazine
N2F4
0158
Tetramethylcyclotetra-siloxane
C4H16Si4O4
0159
Tritium
T2
0160
Difluoromethane
CH2F2
0161
Tertiarybutylarsine
C4H11As
0162
Tertiarybutylphosphine
C4H11P
0163
Triethylborate
C6H15O3B
0164
Dimethylaluminum-hydride
C2H7Al
0165
Trimethylaminealane
C3H12AlN
0166
Dimethylethylaminealane
C4H14NAl
0167
Nitric Acid
HNO3
0168
Tetrachloroethylene
C2Cl4
0169
Ethyleneglycol
C2H6O2
0170
Hexanediol-1,6
C6H14O2
0171
Sulfuric Acid
H2SO4
0172
Chlorobenzene
C6H5Cl
0173
Acetonitrile
C2H3N
0174
Ethylbenzene
C8H10
0175
Intentionaly Left Blank
0176
Methanol
CH4O
0177
Methylcyclohexane
C7H14
0178
4-Methyl, 1-Pentene
C6H12
0179
o-Xylene
C8H10
0180
Phenol
C6H6O
0181
Toluene
C7H8
0182
Tetrahydrofuran
C4H8O
0183
Methyltrichlorosilane
CH3Cl3Si
0184
Acetone
C3H6O
0185
Methylsilane
CH6Si
0186
2,2 Dichloro1,1,1 Trifluoroethane
C2HCl2F3
0187
Isopropal Alcohol
C3H8O
0188
Diethoxy Dimethyl Silane
C6H16O2Si
0189
Sulfur Monochloride
S2Cl2
0190
Trimethyl Silane
C3H10Si
0191
Dichloroethylene -trans
C2H2Cl2
0192
Hexafluorobenzene
C6F6
0193
Phosphorus Trichloride
PCL3
0194
Titaniun Tetraisopropoxide
C12H28OTi
0195
Arsenic Trifluoride
AsF3
0196
Arsenic Triiodine
AsI3
0197
Benzene
C6H6
0198
Borazine
B3N3H6
0199
Bromochlorodifluoromethane
CBrClF2
0200
Carbon Tetrabromide
CBr4
0201
Chlorine Dioxide
ClO2
0202
Chlorine Pentafluoride
ClF5
0203
Chlorodifluoroethane
C2H3ClF2
0204
Chlorodifluoroethylene
C2HClF2
0205
Chlorosilane
SiH3Cl
0206
Chlorotrifluoroethylene
C2ClF3
0207
Cyclobutane
C4H8
0208
Diazomethane
CH2N2
0209
Dibromodifluoromethane
CBr2F2
0210
Dichloroethylene
C2H2Cl2
0211
Dichloroethylene -cis
C2H2Cl2
0212
Dichlorodimethylsilane
C2H6SiCl2
0213
Diethylamine
C4H11N
0214
Diethylzinc
C4H10Zn
0216
Arsenic Trichloride
AsCl3
0217
Digermane
Ge2H6
0218
Dimethylcadmium
C2H6Cd
0219
Dimethylsilane
C2H8Si
0220
Dimethyltellurium
C2H6Te
0221
Ethyl Fluoride
C2H5F
0222
Ethylene Dichloride
C2H4Cl2
0223
Fluoroacetylene
C2HF
0224
Fluorotriethoxysilane
C6H15OSiF
0225
Hexafluoroacetone
C3F6O
0226
Aluminum Trifluoride
AlF3
0227
Hexamethyldisilazane
C6H19Si2N
0228
Hexamethyldisiloxane
C6H18Si2O
0229
Hydrogen telluride
H2Te
0230
Iron Carbonyl
C5O5Fe
0231
Isopentane
C5H12
Code Name Symbol
Code Name Symbol
0232
Difluoroamidogen
NF2
0233
Monoethylamine
C2H7N
0234
Monomethyl hydrazine
CH6N2
0235
Nitromethane
CH3NO2
0236
Octafluorobutane
C4F8
0237
Octane
C8H18
0238
Oxygen Dichloride
OCl2
0239
Pentaborane(11)
B5H11
0240
Pentane
C5H12
0241
Perfluorobutane
C4F10
0242
Arsenic Tribromide
AsBr3
0243
Rhenium Hexafloride
ReF6
0244
Deuteriumsilane
SiD4
0245
Stibine
SbH3
0246
Sulfur Trioxide
SO3
0247
Tellurium Hexafluoride
TeF6
0248
Tetrachlorodiborane
B2Cl4
0249
Tetrafluorodiborane
B2F4
0250
Tetramethylgermanium
C4H12Ge
0251
Tetramethylsilane
C4H12Si
0252
Tetramethyl Tin
C4H12Sn
0253
Tetrasilane
Si4H10
0254
Titanium Tetraiodide
TiI4
0255
Tribromostibine
SbBr3
0256
Trichlorostibine
SbCl3
0257
Triethylaluminum
C6H15Al
0258
Triethylantimony
C6H15Sb
0259
Trifluoroacetic Acid
CF3CO2H
0260
Trifluoroacetonitrile
C2F3N
0261
Trifluorosilane
SiHF3
0262
Triisobutylaluminum
C12H27Al
0263
Xylene m-
C8H10
0264
Xylene p-
C8H10
0265
Dichloromethane
CH2Cl2
0266
Octafluorocyclopentene
C5F8
0267
Hexafluoro Propane
C3H2F6
0268
Methylene Bromide
CH2Br2
0269
Hydrazoic Acid
HN3
0270
Hexafluoro-2-Butyne
C4F6
0271
Butanol-1
C4H10O
0272
Hexafluoro Acetylacetone
C5H2F6O2
0273
Tungsten Hexacarbonyl
C6O6W
0274
TEAsat
C6H15O4As
0275
Hafnium Tetranitrate
HfN4O12
0276
Acrylonitrile
C3H3N
0277
Trimethylborane
C3H9B
0278
Silicon tetrabromide
Br4Si
0279
Tantalum (V) ethoxide
C10H25O5Ta
0280
Diphenylmethylenediamine
C13H14N2
0281
Diphenylmethan-4,4'-diisocyanat
C15H10N2O
0282
Tetrakis( diethylamino )titanium
C16H40N4Ti
0283
Acetic acid
C2H4O2
0284
Dimethyl selenide
C2H6Se
0285
Ethoxy silane
C2H8OSi
0286
Hexafluoropropylene oxide
C3F6O
0287
Trimethoxy silane
C3H10O3Si
0288
Pentafluoropropanol
C3H3F5O
0289
Acrylic acid
C3H4O2
0290
Trifluoropropane
C3H5F3
0291
Ethyl Formate
C3H6O2
0292
Methyl acetate
C3H6O2
0293
Propenamine
C3H7N
0294
Trimethyl ester phosphoric acid
C3H9O4P
0295
Heptafluoropropane
C3HF7
0296
Hexafluorocyclobutene
C4F6
0297
Hexafluoro butadiene-1,3
C4F6
0298
Diethyl sulfide
C4H10S
0299
Tetramethoxygermanium
C4H12GeO4
0300
Dimethoxydimethyl silane
C4H12O2Si
0301
Tetramethoxy silane
C4H12O4Si
0302
Tetramethyl lead
C4H12Pb
0303
Trimethylvinylsilane
C5H12Si
0304
Pyridine
C5H5N
0305
Methyl methacrylate polymer
C5H8O2
0306
Triethyl arsine
C6H15As
0307
Trietoxy arsine
C6H15AsO3
0308
Triethoxyborane
C6H15BO3
0309
Triethylindium
C6H15In
0310
Triethylamine
C6H15N
0311
Triethoxyphosphine
C6H15O3P
0312
Triethoxy silane
C6H16O3Si
0313
Triethyl silane
C6H16Si
0314
Trimethylisoxazole
C6H9NO
0315
Tetraethylgermane
C8H20Ge
0316
Tetraethyl lead
C8H20Pb
0317
Tetraethyl silane
C8H20Si
0318
Tetrakis( dimethylamino )titanium
C8H24N4Ti
0319
Styrene
C8H8
0320
Triallylamine
C9H15N
0321
Trifluoromethylhypofluorite
CF4O
0322
Formaldehyde
CH2O
0323
Iodomethane
CH3I
0324
Xenon difluoride
XeF2
0325
Selenium hexafluoride
SeF6
0326
Disilane hexafluoride
SiF6
0327
Fluoro silane
SiH3F
0328
Trisilane
Si3H8
0329
Mercury
Hg
0330
Zinc
Zn
0331
Acetaldehyde methoxy
C3H6O2
0332
Acetone,hydroxy
C3H6O2
0333
Glycol methylene ether
C3H6O2
0334
Propanoic acid
C3H6O2
0335
Glycidol
C3H6O2
0336
Butanol-2
C4H10O
0337
Tertiary Butyl Alcohol
C4H10O
0338
Diethyl ether
C4H10O
0339
Methyl propyl ether
C4H10O
0340
Methyl isopropyl ether
C4H10O
0341
Isobutyl Alcohol
C4H10O
0342
3-one-2,5-dimethyl hexadiene
C8H10
0343
1,7-Octadiyne
C8H10
0344
2,6-Octadiyne
C8H10
0345
1,3,5,7-Octatetraene
C8H10

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