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Vacuum Pumps > Turbomolecular Pumps > Magnetically Levitated Pumps

Adixen™ (Pfeiffer®) ATH-M Series

The ATH-M series are hybrid magnetically levitated turbo pumps.

The ATH-M are maintenance-free on clean processes. Because the magnetic bearing of the ATH-M series is maintenance-free, the pumps can run for years without any interruption on a clean process. This gives the ATH-M series a significant cost of ownership advantage over ball bearing turbo pumps.

Heating/Cooling:

The MT model features a temperature management system that controls an integrated heater band. The heater band and water cooling maintain the pump internal surface at a constant temperature (up to 75°C) in order to minimize the condensation of by-products inside the pump.

Venting Valve:

The emergency venting valve opens in case of violent shocks or large air-inrushes. The valve brakes the rotor quickly and safely.

High throughput at high pressure:

The ATH-M are designed for high pressure and high throughput, but also provide a low ultimate pressure.

ACT 600 M, ACT 1300 M, and ACT 2300 M:

  • Compact and highly effective electronic monitoring- Includes an intermediate pumping port intended for continuous high vacuum applications, such as mass spectrometers (this extra port is situated between the inlet port and foreline flange)
  • Landing- The pump’s emergency backup bearings can withstand up to five hard landings at full speed in the rare event of an accidental cable disconnection or massive inrush of air. The controller also monitors the status of the backup bearing life.

NOTE: The ATH 500M has an integrated controller so the necessary accessories are a power supply and power cord. The ATH 1300M, ATH 1600M, ATH 2303M, ATH 2300M, ATH 2300MT, and ATP 2300M are available with on-board controllers. Please call our office at 412.387.9200 or email us at sales@lesker.com for more details. All other Adixen magnetically levitated pumps require a controller, interconnect cable (controller to pump), and power cable. We also recommend an inlet screen, which must be purchased separately.

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Specifications Table

Pump Model
ATH
500M/500MT
ATH
1300M/1300MT
ATH
1600M/1600MT
ATH
2300M/2300MT
Max Gas Throughput
N2 (mbar*l/sec.)
4000
3000
2500
2500
Pumping Speed
L/sec (cfm)
500
1250
1500
2100
Compression Ratios
N2: 8.0 x 106
He: 1.0 x 104
H2: 2.0 x 102
N2: 1.0 x 107
He: 2.0 x 103
H2: 1.0 x 102
N2: 6.0 x 107
He: 8.0 x 103
H2: 3.0 x 102
N2: 1.0 x 109
He: 3.0 x 104
H2: 3.0 x 103
Ult. Pressure Torr
(mBar)
1.4 x 10-8
8.0 x 10-9
6.0 x 10-9
4.0 x 10-9
Inlet Flange
ISO160-K
ISO200-F
ISO250-F
ISO250-F
Foreline Flange
QF40
QF40
QF40
QF40
Max. Foreline Press.Torr
(mbar)
1.5 (2.7)
1.125 (1.5)
1.125 (1.5)
1.125 (1.5)
Orientation
Any
Any
Any
Any
Cooling Method
Water
Water
Water
Water
Weight lbs (kg)
37 (17)
75.5 (34)
78.3 (35.5)
102 (46)

Charts

Accessories Table

Description Compatible Pumps PartNo Price Add
To Cart
Description Compatible Pumps PartNo Price Add
To Cart
ACT 1300MController
ATH1300M, ATH1600M
AV-112123
P.O.R.
Interconnect Cable, 3.5 m
(pump to controller)
ATH1300M, ATH1600M
AV-103719
P.O.R.
Power Cord, 2.5 m
US Plug 100–110 VAC
ATH1300M, ATH1600M
AV-A328406
P.O.R.
Power Cord, 2.5 m
US Plug 200–240 VAC
ATH1300M, ATH1600M, ATH2303M
ATH2300M, ATH2300MT, ATH2800M
ATH2800MT, ATH3200M, ATH3200MT
AV-802366
P.O.R.
Heat Control Cable 3.5 m
230 VAC (MT pumps only)
ATH1300MT, ATH1600MT
AV-A328698B
P.O.R.
Heat Control Cable, 3.5 m
110/120 VAC (MT pumps only)
ATH1300MT, ATH1600MT
AV-A328697B
P.O.R.
Heater Band Cable, 3.5 m
(MT pumps only)
ATH2300MT, ATH2800MT, ATH3200MT
AV-460082035
P.O.R.
Water Valve Cable, 3.5 m
(MT pumps only)
ATH2300MT, ATH2800MT, ATH3200MT
AV-A462401035
P.O.R.
Magpower Controller
ATH2302M
ATH/ATP2300 series
ATH2800 series
ATH3200 series
AV-114679
P.O.R.
Interconnect Cable, 2 m
(pump to controller)
ATH2303M, ATH2300M, ATH2300MT
ATH2800M, ATH2800MT, ATH3200M, ATH3200MT
AV-A215300020CD
P.O.R.
Power Cable, 3.5 m
(pump to power supply)
ATH500M
AV-A331328035
P.O.R.
Power Supply
230VAC to 48VDC
ATH500M
AV-114866
P.O.R.
Power Cord, 3.5 m
(power supply to outlet)
US 230 VAC Plug
ATH500M, ATH1300M with on board control
ATH1600M with on board control
ATH2300 US 230 VAC Plug with on board controller
ATH2303M with on board control
AV-A332106035
P.O.R.
Inlet Screen
DN160 flanged pumps
AV-107747
P.O.R.
Inlet Screen
DN200 flanged pumps
AV-107824
P.O.R.

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