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Vacuum Pumps > Turbomolecular Pumps > Magnetically Levitated Pumps

Edwards STP Series


Product Brochure For the full brochure on this product, please click here.

  • Qualified by all major semiconductors OEMs
  • Used in all major semiconductors fabrication plants
  • Installed base of more than 80000 units, 85% in the semiconductor industry

Heating/Cooling:

The MT model features a temperature management system that controls an integrated heater band. The heater band and water cooling maintain the pump internal surface at a constant temperature (up to 75°C) in order to minimize the condensation of by-products inside the pump.

Features:

  • Optimized for semiconductor process pressure
  • Complete range from 300 to 4500ls-1
  • Application specific models
  • Installation in any orientation
  • Supported globally by Edwards

STP Range:

  • High throughput series
  • Holweck stage to provide advanced throughput performance
  • Highest levels of throughput required by the next generation of semiconductor etch and CVD processes

Corrosion Resistant:

To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nicke-coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request.

Nitrogen Purging:

The corrosion-resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases, minimizing their damage to the pump’s motor and sensor coils.

TMS System:

The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particular condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but will also increase its operational life.

Description:

  • iX : Integrated controller
  • C : Corrosive, semi-conductor rated
  • STPH : High throughput
  • STPA : Advanced high throughput
  • STP-X : High throughput and high flow for lighter gases
  • STP-L : Low vibration, for electron microscope and semicon
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Remanufactured Pumps

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Specifications Table

Pump Model Max Gas
Throughput— N2
(mbar*l/sec.)
Pumping
Speed
L/sec (cfm)
Compression
Ratios
Ult. Pressure
Torr (mBar)
Inlet
Flange
Foreline
Flange
Max. Foreline
Press.
Torr (mbar)
Orientation Cooling Method Weight
lbs (kg)
STPH301C
N/A
300
N2: 1.0 x 108
H2: 1.4 x 103
10-9
(10-9)
6" CF (DN100CF)
KF40
5
Any
Water
33
(15)
STP-L301 /
STP-LL301C
N/A
260
N2: 1.0 x 108
H2: 2.0 x 104
10-8
(10-8)
6" CF (DN100CF)
KF25
1.0 x 10-1
Any
Natural
Convection
(water cooling
optional)
28.7
(13)
STP301 /
STP301C
N/A
300
N2: 1.0 x 108
H2: 2.0 x 104
10-10
(10-9 for
C version)
6" CF (DN100CF)
KF25
1.0 x 10-1
Any
Natural
Convection
(water cooling
optional)
24.25
(11)
STP-iX455
N/A
450
N2: 1.0 x 108
H2: 4.0 x 104
10-10
(10-10)
8" CF (DN160CF)
KF40
5.0 x 10-1
(6.7 x 10-1)
Any
Natural
Convection
35.5
(16)
STPH451C
N/A
450
N2: 1.0 x 108
H2: 1.0 x 103
10-9
(10-9)
8" CF (DN160CF)
KF40
5
Any
Water
33
(15)
STP603 /
STP603C
N/A
650
N2: 1.0 x 108
H2: 1.0 x 105
10-10
(5E-8 for
C version)
8" CF (DN160CF)
KF40
N/A
Any
Natural
Convection
(water cooling
optional)
68.4
(31)
STPA803C
N/A
800
N2: 1.0 x 108
H2: 1.0 x 103
10-9
(10-9)
8" CF (DN160CF)
KF40
2
Any
Water
86
(39)
STP1003 /
STP1003C
N/A
1000
N2: 1.0 x 108
H2: 1.0 x 105
10-10
(5E-8 for
C version)
10" CF (DN200CF)
KF40
0.1
Any
Natural
Convection
(water cooling
optional)
68.4 (31)
STPA1303C
N/A
1300
N2: 1.0 x 108
H2: 1.0 x 103
10-9
(10-9)
10" CF (DN200CF)
KF40
2
Any
Water
86
(39)
STPA1603C
N/A
1600
N2: 1.0 x 108
H2: 7.0 x 103
10-10
(10-9)
10" CF (DN200CF)
KF40
2
Any
Water
77.2
(35)
STPA2203C
1500
2200
N2: 1.0 x 108
H2: 2.5 x 104
10-8
(10-8)
ISO250-F
KF40
3
Any
Water
134.5
(16)
STP-XA2703C
2300
2650
N2: 1.0 x 108
H2: 6.0 x 103
10-10
(10-9)
ISO250-F
KF40
2
Any
Water
165
(75)
STP-XZ3203C
2300
3200
N2: 1.0 x 108
H2: 6.0 x 103
10-10
(10-9)
ISO250-F
KF40
2
Any
Water
N/A
STP-XA4503C
2800
4000
N2: 1.0 x 108
H2: 6.0 x 103
10-10
(10-9)
ISO250-F
KF40
2.66
Any
Water
231.5
(105)

Got VacuCADSM?
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Ordering Table

Pump
Model
Inlet
Flange
Manual PartNo Price Add To Cart
Pump
Model
Inlet
Flange
Manual PartNo Price Add To Cart
STP-L301
ISO100-K
--
ED-B75800090
P.O.R.
STP-L301
DN100CF (6.00" OD)
--
ED-PT470Z000
P.O.R.
STP-L301C
ISO100-K
--
ED-B75800010
P.O.R.
STP-L301C
DN100CF (6.00" OD)
--
ED-PT47AZ030
P.O.R.
STP-XA2703C
ISO250-F
--
ED-PT660Z140
P.O.R.
STP-XA2703C
DN250CF (12.00" OD)
--
ED-PT6610010
P.O.R.
STP-XA3203C
DN250CF (12.00" OD)
--
ED-PT660Z080
P.O.R.
STP-XA3203C
ISO250-F
--
ED-YT660Z050
P.O.R.
STP-iX455
DN100CF (6.00" OD)
--
ED-PT640Z050
P.O.R.
STP-iX455
DN160CF (8.00" OD)
--
ED-PT640Z060
P.O.R.
STP1003
DN200CF (10.00" OD)
--
ED-B72101040
P.O.R.
STP1003
ISO200-F
--
ED-PT390Z001
P.O.R.
STP1003C
DN200CF (10.00" OD)
--
ED-PT39AZ003
P.O.R.
STP301
ISO100-K
Download PDF
ED-B74830020
P.O.R.
STP301
DN100CF (6.00" OD)
Download PDF
ED-B74831010
P.O.R.
STP301C
ISO100-K
Download PDF
ED-B74871010
P.O.R.
STP301C
DN100CF (6.00" OD)
Download PDF
ED-B74881010
P.O.R.
STP603
ISO160-F
--
ED-B72102010
P.O.R.
STP603
DN160CF (8.00" OD)
--
ED-PT390Z005
P.O.R.
STP603C
ISO160-F
--
ED-B72102020
P.O.R.
STP603C
DN160CF (8.00" OD)
--
ED-PT39AZ002
P.O.R.
STPA1303C
ISO200-F
--
ED-B71802020
P.O.R.
STPA1303CV (TMS)
DN200CF (10.00" OD)
--
ED-PT3626004
P.O.R.
STPA1303CV (TMS)
ISO200-F
--
ED-PT3626005
P.O.R.
STPA1603C
ISO200-F
--
ED-B75100010
P.O.R.
STPA1603C
DN200CF (10.00" OD)
--
ED-B75100100
P.O.R.
STPA1603CV (TMS)
ISO200-F
--
ED-PT4616004
P.O.R.
STPA1603CV (TMS)
DN200CF (10.00" OD)
--
ED-PT4616005
P.O.R.
STPA2203C
ISO250-F
--
ED-YT4V0Z002
$32,419.00
STPA2203CV (TMS)
ISO250-F
--
ED-PT4V66001
P.O.R.
STPA2203CV (TMS)
DN250CF (12.00" OD)
--
ED-PT4V66002
P.O.R.
STPA803C
ISO160-F
--
ED-B71801000
P.O.R.
STPA803C
DN160CF (8.00" OD)
--
ED-B71805010
P.O.R.
STPA803CV (TMS)
ISO160-F
--
ED-PT3626000
P.O.R.
STPA803CV (TMS)
DN160CF (8.00" OD)
--
ED-PT3626003
P.O.R.
STPH301C
ISO100-F
Download PDF
ED-B71901010
P.O.R.
STPH301C
DN100CF (6.00" OD)
Download PDF
ED-PT340Z004
P.O.R.
STPH301CV (TMS)
ISO100-F
Download PDF
ED-PT3416001
P.O.R.
STPH301CV (TMS)
DN100CF (6.00" OD)
Download PDF
ED-PT3416005
P.O.R.
STPH451C
ISO160-F
Download PDF
ED-B71901001
P.O.R.
STPH451C
DN160CF (8.00" OD)
Download PDF
ED-PT340Z005
P.O.R.
STPH451CV (TMS)
DN160CF (8.00" OD)
Download PDF
ED-PT3416006
P.O.R.
STPH451CV (TMS)
ISO160-F
Download PDF
ED-PT3416007
P.O.R.

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

Description Compatible Pumps PartNo Price Add
To Cart
Description Compatible Pumps PartNo Price Add
To Cart
SCU-1400 Controller
STP-A2203/2503/2803/3003/3503
STP-F2203, STP-XA2703/3203, STP-XH2603/3203
ED-YT72Z0Z00
P.O.R.
SCU-800 Controller
STP603/1003 Series
STPH301/H451 Series
STPH803/H1303 Series
STPA803C/A1303 Series
STPA1603 Series
ED-PT49Z0Z00
P.O.R.

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