Welcome to the Kurt J. Lesker Company.  

Sign In | Register

Current Region: International (Change) | Contact Us |   RSS   Twitter   LinkedIn   YouTube

Close

Please select your country or region to be
directed to the appropriate Lesker site.

Vacuum Pumps > Turbomolecular Pumps > Magnetically Levitated Pumps

Shimadzu Mag-Lev—LM/LMC Series

Product Downloads
For the full brochure on this product, please click here.

Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 1011 for N2; and for some versions extends the fore-vacuum tolerance up to 30 Torr.

Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry.

Features:

  • Lubricant-free, magnetically levitated rotor bearings make them completely oil-free when backed by a dry pump
  • High foreline pressure tolerance gives them the ability to work with lower cost dry mechanical pumps
  • Low pump profile designs for easy mounting
  • High compression ratios for all gases
  • Interactive rotor balancing ensures maximum uptime
  • Self-tuning cables and frequency converters for ease of use
  • Use extensively in applications requiring oil-free, ultra-clean, and ultrahigh vacuums (corrosion-resistant version can also be used in corrosive gas production environments)
  • Chemical series available for corrosive applications (LMC models)

Applications:

  • Mass spectrometry
  • SIMS
  • Electron microscopy
  • Surface science and analysis
  • Special ultra-clean leak detection
  • Particle accelerators
  • Space simulation experiments
  • Oxygen plasma etching processes
  • Implant tools for semiconductor processes
Remanufactured Vacuum Pumps
Remanufactured Pumps

View a list of remanufactured vacuum pumps available from The Kurt J. Lesker Company's Remanufactured Vacuum Pump Division.
View List ▶

Vacuum Pump Repair & Services
Pump Repair & Services

Our factory-trained vacuum pump service technicians are equipped to handle the maintenance and repair of virtually any brand and type of vacuum pump.
View Details ▶


Specifications Table

Pump Model Pumping
Speed
L/sec (cfm)
Compression
Ratios
Ult. Pressure
Torr (mBar)
Inlet
Flange
Foreline
Flange
Max. Foreline
Press.
Torr (mbar)
Backing Pump Min.
Speed - CFM (m3/hr)
Orientation Cooling Method Weight
lbs (kg)
203LM/LMC
190
N2: 1.0 x 109
He: 6.0 x 104
H2: 4.0 x 103
1 x 10-10
(1.3 x 10-10)
ISO100-K or 6" CF (DN100CF)
KF25
4 (5.3)
7 (12)
Any (360°)
Water
19.8 (9)
303LM/LMC
320
N2: 1.0 x 109
He: 8.0 x 104
H2: 1.0 x 104
1 x 10-10
(1.3 x 10-10)
ISO100-K or 6" CF (DN100CF)
KF25
4 (5.3)
7 (12)
Any (360°)
Water
30.8 (14)
403LM/LMC
420
N2: 1.0 x 109
He: 8.0 x 104
H2: 1.0 x 104
1 x 10-10
(1.3 x 10-10)
ISO160-K or 8" CF (DN160CF)
KF25
4 (5.3)
7 (12)
Any (360°)
Water
30.8 (14)
803LM/LMC
800
N2: 1.0 x 109
He: 8.0 x 104
H2: 4.0 x 103
1 x 10-11
(1.3 x 10-11)
ISO160-K or 8" CF (DN160CF)
KF40
3 (4)
17.6 (29.9)
Any (360°)
Water
68.2 (31)
1003LM/LMC
1080
N2: 1.0 x 109
He: 8.0 x 104
H2: 4.0 x 103
1 x 10-11
(1.3 x 10-11)
ISO200-F or 10" CF (DN200CF)
KF40
5 (6.6)
17.6 (29.9)
Any (360°)
Water
70.4 (32)
2003LM/LMC
2000
N2: 1.0 x 109
He: 7.0 x 105
H2: 1.4 x 104
1 x 10-11
(1.3 x 10-11)
ISO250-F or 12" CF (DN250CF)
KF40
2 (2.6)
17.6 (29.9)
Any (360°)
Water
121 (55)
3203LM/LMC
3200
N2: 1.0 x 109
He: 3.0 x 105
H2: 1.0 x 104
1 x 10-9
(1.3 x 10-9)
ISO320-F
KF40
2 (2.6)
53 (90.1)
Any (360°)
Water
155 (70)

Charts

Got VacuCADSM?
VacuCAD is a free library containing thousands of 2D CAD drawings (in DXF format) and 3D Models (in STP format) for many of our standard vacuum components and chambers. Please Log in

Ordering Table

Pump
Model
Inlet
Flange
Manual PartNo Price Add To Cart
Pump
Model
Inlet
Flange
Manual PartNo Price Add To Cart
TMP203LM
DN100CF (6.00" OD)
Download PDF
SM8144541
$12,333.00
TMP203LM
ISO100-K
Download PDF
SM8144543
P.O.R.
TMP203LMC
DN100CF (6.00" OD)
Download PDF
SM8144551
$15,166.00
TMP203LMC
ISO100-K
Download PDF
SM8144553
P.O.R.
TMP303LM
DN100CF (6.00" OD)
Download PDF
SM8143541
$14,500.00
TMP303LM
ISO100-K
Download PDF
SM8143543
$14,500.00
TMP303LMC
DN100CF (6.00" OD)
Download PDF
SM8143551
P.O.R.
TMP303LMC
ISO100-K
Download PDF
SM8143553
P.O.R.
TMP403LM
DN160CF (8.00" OD)
Download PDF
SM8145541
$15,500.00
TMP403LM
ISO160-K
Download PDF
SM8145543
$15,500.00
TMP403LMC
DN160CF (8.00" OD)
Download PDF
SM8145551
$18,166.00
TMP403LMC
ISO160-K
Download PDF
SM8145553
P.O.R.
TMP803LM
DN160CF (8.00" OD)
Download PDF
SM1828241
$17,166.00
TMP803LM
ISO160-K
Download PDF
SM1828245
$17,166.00
TMP803LMC
DN160CF (8.00" OD)
Download PDF
SM1828251
P.O.R.
TMP803LMC
ISO160-K
Download PDF
SM1828255
P.O.R.
TMP1003LM
DN200CF (10.00" OD)
Download PDF
SM8141041
$18,166.00
TMP1003LM
ISO200-F
Download PDF
SM8141045
$18,165.00
TMP1003LMC
DN200CF (10.00" OD)
Download PDF
SM8141051
$20,833.00
TMP1003LMC
ISO200-F
Download PDF
SM8141055
P.O.R.
TMP3203LM
ISO320-F
Download PDF
SM7843043
P.O.R.
TMP3203LMC
ISO320-F
Download PDF
SM7843053
$36,500.00

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

For Pump Model(s) Description PartNo Price Add
To Cart
For Pump Model(s) Description PartNo Price Add
To Cart
LM/LMC 203
Baking Heater (115V/100W)
SM0014101
P.O.R.
LM/LMC 303-403
Baking Heater (115V/100W)
SM0014111
P.O.R.
LM/LMC 803-1003
Baking Heater (208V/200W)
SM7456918
P.O.R.
LM/LMC 2003-3203
Baking Heater (208V/600W)
SM7456915
P.O.R.
All LM/LMC Series Pumps
Interconnect Cable for
Power Supply to Pump (10 m)
SM1620010
P.O.R.
All LM/LMC Series Pumps
Interconnect Cable for
Power Supply to Pump (15 m)
SM1620015
P.O.R.
All LM/LMC Series Pumps
Interconnect Cable for
Power Supply to Pump (3 m)
SM1620003
$1,083.00
All LM/LMC Series Pumps
Interconnect Cable for
Power Supply to Pump (5 m)
SM1620005
$1,350.00
LM/LMC 803-3203
Motor Power Cable (10 m)
SM7640910
P.O.R.
LM/LMC 803-3203
Motor Power Cable (15 m)
SM7640915
P.O.R.
LM/LMC 803-3203
Motor Power Cable (20 m)
SM7640920
P.O.R.
LM/LMC 803-3203
Motor Power Cable (3 m)
SM7640903
$250.00
LM/LMC 803-3203
Motor Power Cable (5 m)
SM7640905
$300.00
TMP 803, 1003, 2003, 3203
Power Supply and Controller, EI-R04M
(200-240 VAC, 1-Øm 50/60 Hz)
SM7898202
$5,583.00
TMP 203, 303, 403
Power Supply and Controller, EI-S04M
(110-120 VAC, 1-Øm 50/60 Hz)
SM1804401
$5,583.00
TMP 203, 303, 403
Power Supply and Controller, EI-S04M
(200-240 VAC, 1-Øm 50/60 Hz)
SM1804402
P.O.R.

ISO:9001 The Kurt J. Lesker Company is an ISO:9001 certified company. Copyright ©1996-2017 Kurt J. Lesker Company® All rights reserved.