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Busch Cobra Series Screw Vacuum Pump



The COBRA dry screw vacuum pumps offer state-of-the-art harsh duty process and high capacity load lock solutions for the most demanding solar, flat panel, semiconductor or coating applications. These vacuum pumps have best-in-class pumping speed combined with superior hydrogen throughput and excellent powder handling capabilities resulting from their unique screw pump design.

COBRA BA 0100 C series pumps use a high performing, air cooling method eliminating the need for cooling water. The unique "flying bearing" screw suspension design eliminates inlet bearing issues and allows for a reduced footprint.

The COBRA BC 0100 F series pumps include PLC controls and are provided with a special coating for handling of corrosive gases and vapors. These vacuum pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket. The BC series also utilizes the unique "flying bearing" screw suspension design eliminates inlet bearing issues and allows for a reduced footprint.

Features:

  • Cost-effective, long uptime, energy-efficient
  • Long service intervals
  • Operationally reliable
  • Application-oriented
  • Quiet operation ≤ 58 dB (A)

Applications:

  • Atomic layer deposition (ALD)
  • High-density plasma CVD (HDP CVD)
  • Sub-atmospheric CVD (SACVD)
  • Metal-organic CVD (MOCVD)
  • Plasma-enhanced CVD (PECVD)
  • Low-pressure CVD (LPCVD)
  • Rapid thermal processing (RTP)
  • Load-lock application
Remanufactured Vacuum Pumps
Remanufactured Pumps

View a list of remanufactured vacuum pumps available from The Kurt J. Lesker Company's Remanufactured Vacuum Pump Division.
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Vacuum Pump Repair & Services
Pump Repair & Services

Our factory-trained vacuum pump service technicians are equipped to handle the maintenance and repair of virtually any brand and type of vacuum pump.
View Details ▶


Specifications Table

Pump Model
BA 0100 C
BC 0100 F
Disp. CFM @ 60 Hz
(m3/hr @ 50 Hz)
62
(85)
59
(100)
Ult. Pressure Torr
(mBar)
7.5x10-3
(1x10-2)
7.5x10-3
(1x10-2)
Motor HP (kW)
2.4 (1.8)
2.4 (1.8)
Inlet Flange
DN 50 KF
DN 50 KF
Exhaust Flange
DN 40 KF
DN 40 KF
Dimensions
LxWxH - in. (mm)
25 x 12 x 13 3/8
33 x 12 x 14 1/4
Weight lbs (kg)
265 (120)
265 (120)
Noise db(A)
58
58

Dimensional Drawings

Note A charge of Fomblin is included with the BA 0100C. However, Fomblin is not included with BC 0100 F and will need to be ordered separately.

Got VacuCADSM?
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Ordering Table

Pump
Model
Inlet
Flange
Voltage &
Phases
Inlet
Flange
Manual PartNo Price Add To Cart
Pump
Model
Inlet
Flange
Voltage &
Phases
Inlet
Flange
Manual PartNo Price Add To Cart
BA 0100 C
KF50
208-240/380-480V
50/60Hz,3-Ø
DN50 ISO-KF
Download PDF
1361570714
P.O.R.
BA 0100 C
KF50
200-230V
60Hz, 3-Ø
DN50 ISO-KF
Download PDF
1361570761
P.O.R.
BC 0100 F
KF50
200/400/460V
50/60Hz, 3-Ø
DN50 ISO-KF
Download PDF
1361700216
P.O.R.

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

For Pump Model(s) Description PartNo Price Add
To Cart
For Pump Model(s) Description PartNo Price Add
To Cart

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