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Oerlikon Leybold Scrollvac Series Scroll Vacuum Pumps

Features

  • Oil free
  • High effective pumping speed
  • Low ultimate pressure
  • Low vibration operation
  • Atmospheric inlet pressure allowable

Applications

  • Sputtering Equipment, vacuum deposition equipment, ion plating equipment
  • Surface modification, electron beam process
  • Accelerator, synchrotron radiation
  • Surface modification, electron beam process
  • Vacuum furnace, heat treatment furnace
  • Laboratory use
Remanufactured Vacuum Pumps
Remanufactured Pumps

View a list of remanufactured vacuum pumps available from The Kurt J. Lesker Company's Remanufactured Vacuum Pump Division.
View List ▶

Vacuum Pump Repair & Services
Pump Repair & Services

Our factory-trained vacuum pump service technicians are equipped to handle the maintenance and repair of virtually any brand and type of vacuum pump.
View Details ▶


Specifications Table

Pump Model
SC 5 D
SC 15 D
SC 30 D
SC 60 D
Disp. CFM @ 60 Hz
(m3/hr @ 50 Hz)
3.5 (4.8)
9.1 (13.0)
18.3 (26.0)
36.5 (52.0)
Ult. Pressure Torr
(mBar)
3.8 x 10-2
5.0 x 10-2
1.2 x 10-2
1.6 x 10-2
8.0 x 10-3
1.0 x 10-2
8.0 x 10-3
1.0 x 10-2
Motor HP (kW)
0.2 (150)
0.54 (400)
0.82 (600)
1.90 (1400)
Inlet Flange
DN 25 ISO-KF
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 ISO-KF
Exhaust Flange
DN 16 ISO-KF
DN 16 ISO-KF
DN 25 ISO-KF
DN 40 ISO-KF
Input Voltage
1-ph 100V/50Hz,
100-115V/60Hz,
200/230V 50/60Hz
1-ph 100V/50Hz,
100-115V/60Hz ,
200/230V,50/60hz
3-ph 200V,
380-415V/50Hz,
200-380V,
460V/60Hz
1-ph 100V/50Hz,
100-115V/60Hz,
200/230V,50/60hz,
3-ph 200V,
380-415V/50Hz,
200-380V,
460V/60Hz
3-ph 200V,
380-400-415V 50hz,
3-ph, 200-220-230V-460V60hz
Weight lbs (kg)
30.9 (14.0)
55.2 (25.0)
97.1 (44.0)
132.5 (60.0)
Noise db(A)
≤52 Db(A)
w/purge gas: ≤57 Db(A)
≤58 dB (A)
w/purge gas: ≤66 dB (A)
≤62 dB (A)
w/purge gas: ≤70 dB (A)
≤67 dB (A)
w/purge gas: ≤74 dB (A)

Dimensional Drawings

Charts

Product Datasheet
For a download of the product datasheet, click here.
Pumps FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.
Got VacuCADSM?
VacuCAD is a free library containing thousands of 2D CAD drawings (in DXF format) and 3D Models (in STP format) for many of our standard vacuum components and chambers. Please Log in

Ordering Table

Pump
Model
Description Inlet
Flange
Voltage &
Phases
Manual PartNo Price Add To Cart
Pump
Model
Description Inlet
Flange
Voltage &
Phases
Manual PartNo Price Add To Cart
SC 15 D
With 2.5m power cord, EU Plug
KF25
1-ph motor: 200/230 V, 50/60 Hz
Download PDF
LH-133001
P.O.R.
SC 15 D
No power cord included
KF25
3-ph motor: 200 V, 380-415 V, 50 Hz/ 200-230 V, 460 V, 60 Hz
Download PDF
LH-133003
P.O.R.
SC 15 D
With 2.5m power cord, US Plug
KF25
1-ph motor: 100V, 50Hz/100-115V, 60Hz
Download PDF
LH-133101
P.O.R.
SC 30 D
With 2.5m power cord, EU Plug
KF40
1-ph motor: 200/230 V, 50/60 Hz
Download PDF
LH-133002
P.O.R.
SC 30 D
No power cord included
KF40
3 phase 200 V, 380-415 V, 50 Hz // 200-230 V, 460 V, 60Hz
Download PDF
LH-133004
P.O.R.
SC 30 D
With 2.5m power cord, US Plug
KF40
1-ph motor: 100 V, 50 Hz/100-115 V, 60 Hz
Download PDF
LH-133102
P.O.R.
SC 5 D
With 2.5m power cord, EU Plug
KF25
1-ph motor: 200/230 V, 50/60 Hz
Download PDF
LH-133000
P.O.R.
SC 5 D
With 2.5m power cord, US Plug
KF25
1-ph motor: 100 V, 50 Hz/100-115 V, 60 Hz
Download PDF
LH-133100
P.O.R.
SC 60 D
No power cord included
KF40
3-ph motor: 200 V, 380-400-415 V, 50 Hz/200-220-230 V, 460 V, 60 Hz
Download PDF
LH-133008
P.O.R.

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

For Pump Model(s) Description PartNo Price Add
To Cart
For Pump Model(s) Description PartNo Price Add
To Cart
SC 5 D
Minor Service Kit
LH-EK870000496
P.O.R.
SC 5 D
Major Service Kit
LH-EK870000499
P.O.R.
SC 5 D
Tip Seal Kit
LH-E870000510
P.O.R.
SC 5 D
Pin Crank Kit
LH-EK870000507
P.O.R.
SC 15 D
Minor Service Kit
LH-EK870000497
P.O.R.
SC 15 D
Major Service Kit
LH-EK870000500
P.O.R.
SC 15 D
Tip Seal Kit
LH-E870000511
P.O.R.
SC 15 D
Pin Crank Kit
LH-EK870000508
P.O.R.
SC 30 D
Minor Service Kit
LH-EK870000498
P.O.R.
SC 30 D
Major Service Kit
LH-EK870000501
P.O.R.
SC 30 D
Tip Seal Kit
LH-E870000512
P.O.R.
SC 30 D
Pin Crank Kit
LH-EK870000509
P.O.R.
SC 60 D
Minor Service Kit
LH-EK870000519
P.O.R.
SC 60 D
Major Service Kit
LH-EK870000520
P.O.R.
SC 60 D
Tip Seal Kit
LH-E870000522
P.O.R.
SC 60 D
Pin Crank Kit
LH-EK870000523
P.O.R.
SC 5-60 D
Air Flush Kit
LH-EK870000515
P.O.R.

 

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