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Vacuum Pumps > Turbomolecular Pumps > Turbo Single Stage Pumps > Turbo Single Stage Pumps

Oerlikon Leybold Chemical TMP TurboVac Series

TMP Chemical Series pumps are engineered for the aggressive environments of corrosive gas processes, such as reactive ion and ion beam etching and reactive sputtering

ORDERING NOTE: All pumps require the following accessories for operation: Controller, Interconnect Cable and Power Cord.

Remanufactured Vacuum Pumps
Remanufactured Pumps

View a list of remanufactured vacuum pumps available from The Kurt J. Lesker Company's Remanufactured Vacuum Pump Division.
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Vacuum Pump Repair & Services
Pump Repair & Services

Our factory-trained vacuum pump service technicians are equipped to handle the maintenance and repair of virtually any brand and type of vacuum pump.
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Specifications Table

Pump Model
TMP151C
TMP361C
TMP361C
TMP1000C
TMP1100C
TMP600C
Pumping Speed
L/sec (cfm)
145
345
400
1100
1050
560
Compression Ratios
N2: 1.0 x 109
He: 2.0 x 104
H2: 8.0 x 102
Ar: 8 x 102
N2: 1.0 x 109
He: 2.0 x 104
H2: 3.0 x 103
Ar: 8 x 102
N2: 1.0 x 109
He: 2.0 x 104
H2: 3.0 x 103
Ar: 8 x 102
N2: 1.0 x 109
He: 5.0 x 104
H2: 2.0 x 103
Ar: 2 x 103
N2: 1.0 x 105
He: N/A
H2: 1.0 x 104
Ar: 1.0 x 104
N2: > 109
He: 2.0 x 104
H2: 1.1 x 103
Ar: N/A
Ult. Pressure Torr
(mBar)
7.5 x 10-11
(1 x 10-10)
7.5 x 10-11
(1 x 10-10)
7.5 x 10-11
(1 x 10-10)
1 x 10-10
(1.3 x 10-10)
2.2 x 10-10
(3 x 10-10)
<10-10
(<10-10)
Inlet Flange
ISO100-K or 6" CF (DN100CF)
ISO100-K
ISO160-K
10" CF (DN200CF)
ISO250-K
ISO160-K or 8" CF (DN160CF)
Foreline Flange
KF25
KF25
KF25
KF40
ISO63-K
KF40
Max. Foreline Press.Torr
(mbar)
3.75 x 10-1
(5 x 10-1)
3.75 x 10-1
(5 x 10-1)
3.75 x 10-1
(5 x 10-1)
3.75 x 10-1
(5 x 10-1)
7.5 x 10-2
(1 x 10-1)
0.75 x 10-1
(1 x 10-1)
Backing Pump Min.Speed
CFM (m3/hr)
11.7 (19.8)
18.2 (30.8)
18.2 (30.8)
18.2 (30.8)
12.9 (22)
18.2 (30.8)
Orientation
Any (360°)
Any (360°)
Any (360°)
Any (360°)
Any (360°)
Any (360°)
Cooling Method
Water Standard
(air available)
Water Standard
(air available)
Water Standard
(air available)
Water Standard
(air available)
Water Standard
Water Standard
(air available)
Weight lbs (kg)
17 (8)
26 (12)
26 (12)
55 (25)
48 (22)
37.5 (17)

Charts

Dimensional Drawings

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Ordering Table

Pump
Model
Description Inlet
Flange
Manual PartNo Price Add To Cart
Pump
Model
Description Inlet
Flange
Manual PartNo Price Add To Cart
TMP1000C
Chemical (TMP Series)
DN200CF (10.00" OD)
Download PDF
LH-11764
P.O.R.
TMP151C
Chemical (TMP Series)
ISO100-K
Download PDF
LH-85635
$9,233.80
TMP361C
Chemical (TMP Series)
ISO100-K
Download PDF
LH-85675
P.O.R.
TMP361C
Chemical (TMP Series)
ISO160-K
Download PDF
LH-85677
$13,353.80
TMP600C
Chemical (TMP Series)
ISO160-K
Download PDF
LH800150V0015
$14,350.80

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

For Pump Model(s) Description PartNo Price Add
To Cart
For Pump Model(s) Description PartNo Price Add
To Cart
All TMP Series Pumps
Adaptive Fluorocarbon Centering Ring
for KF10 to KF16 Flange
QF10-16-ASRV
$10.70
TMP 600C, TMP1000C
Air Cooling Kit (115 VAC)
LH-170016
P.O.R.
TMP151(C), TMP361(C),TMP600C, TMP1000C, TMP1100C
Interconnect Cable for
TD20 Controller to Pump (3 m)
LH-85765
$222.00
TMP151(C), TMP361(C),TMP600C, TMP1000C, TMP1100C
Interconnect Cable for
TD20 Controller to Pump (5 m)
LH-85766
$333.59
TMP151(C), TMP361(C), TMP600C, TMP1000C, TMP1100C
Power Cord for TD20
Euro Plug, 220 VAC, 3 m
LH-800102V0002
P.O.R.
TMP151(C), TMP361(C), TMP600C, TMP1000C, TMP1100C
Power Cord for TD20
US Plug, 115 VAC, 3 m
LH-99276513
$37.00
TMP151(C), TMP361(C), TMP600C, TMP1000C, TMP1100C
TD20 Controller
(100–240 VAC, 50/60 HZ)
LH-800075V0005
P.O.R.
All TMP Series Pumps
Vent Valve—115 VAC, 50/60 Hz
(normally open/KF10 flanged)
LH-899838
$505.00

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