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Vacuum Pumps > Turbomolecular Pump Stations

Edwards EXT/DX TIC Controlled Pumping Stations

Edwards combines the proven design of their EXT/DX Series turbo pumps with a backing pump in an integrated unit.


  • Fully assembled turnkey pumping solution
  • Turbo pump and backing pump with integrated TIC controller
  • Rotary vane or scroll backing pumps available
  • System start/stop from on-board controller
  • Pumping and gauge control from integrated TIC controller
  • RS232 and RS485 communication protocols available
  • Integrated air-cooling kit
  • Ultimate pressures to 5 x 10-10 mbar (CF flange models)


  • UHV systems
  • Beam lines
  • Load locks
  • Surface science
  • Surface science


  • Gauge heads and cables(order separately)
  • Oil mist eliminators(included)
Remanufactured Vacuum Pumps
Remanufactured Pumps

View a list of remanufactured vacuum pumps available from The Kurt J. Lesker Company's Remanufactured Vacuum Pump Division.
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Vacuum Pump Repair & Services
Pump Repair & Services

Our factory-trained vacuum pump service technicians are equipped to handle the maintenance and repair of virtually any brand and type of vacuum pump.
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Product Manual For the manual on this series of products, please click here.

Start Your Configuration

Choose the turbo pump, inlet flange, backing pump, vent option and electrical supply. Next, compose the order code as shown, below.

1. Turbo Pump:
2. Inlet Flange:
3. Backing Pump:
4. Vent Option:
5. Electrical Supply:


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