Welcome to the Kurt J. Lesker Company.  

Sign In | Register

Current Region: International (Change) | Contact Us |   RSS   Twitter   LinkedIn   YouTube

Close

Please select your country or region to be
directed to the appropriate Lesker site.

Vacuum Valves > Conductance Control Valves

Conductance Control Multi-Vane Valves (ISO flanged)

Multi-Vane Conductance Control Valves

  • CF Flanged Valves have stainless steel flanges and vanes, while others have clear alodine aluminum flanges with SST vanes.
  • Have no parts protruding above or below the flange surfaces in the open position
  • Radial vanes give a uniform gas flow through the valve
  • Available in very large sizes (up to 35" ASA) on request

Pneumatic version

  • Operates in 2 positions (fully open or preset, manually adjustable throttled position)
  • Built-in micrometer allows repeatable, precision settings to .001"

Since the rotating vanes cannot completely block gas, never use vane-style conductance control valves as shutoff valves (see table). They simply throttle the gas flow, enabling a higher pressure in the chamber while maintaining the pumping system within its normal pressure range.

This effect has three main applications

  • Quickly raising the pressure in a normal high vacuum chamber needed for "gassy" processes such as sputtering or plasma etching, rapidly returning to high vacuum.
  • Reducing the gas flow required for a process because the pumping system's full pumping speed is not used while gas is let in. This reduces the expense of pure gases while reducing the problems associated with removing corrosive or active gases.
  • Where chamber wall desorption will contaminate the process gas, the conductance control valve is adjusted to the optimum compromise between minimizing gas usage and maintaining contamination below some required level.

NOTE: Pneumatic valves require 60–80 psi air pressure for actuation. ASA flanged multi-vane control valves have a flange o-ring groove on one side as standard.


Dimensional Drawings


Got VacuCADSM?
VacuCAD is a free library containing thousands of 2D CAD drawings (in DXF format) and 3D Models (in STP format) for many of our standard vacuum components and chambers. Please Log in

Ordering Table

(Click column headers to sort data)

Flange
Size
Type Max Conductance
(L/Sec.)
Min. Conductance
(L/Sec.)
Dim A Dim ID Manual PartNo Price Add Item
VacuCADSM
Flange
Size
Type Max Conductance
(L/Sec.)
Min. Conductance
(L/Sec.)
Dim A Dim ID Manual PartNo Price Add Item
VacuCADSM
ISO100F Motorized Valves 660 15 1.75" 4.0"
--
TV04QFE1AA
P.O.R.
N/A
ISO100F Pneumatic Valves 660 15 1.75" 4.0"
--
TV04QFPAA
P.O.R.
N/A
ISO160F Motorized Valves 1,550 20 2.25" 6.0"
--
TV06QFE1AA
P.O.R.
N/A
ISO160F Pneumatic Valves 1,550 20 2.25" 6.0"
--
TV06QFPAA
P.O.R.
N/A
ISO200F Motorized Valves 2,440 30 2.38" 7.4"
--
TV08QFE1AA
P.O.R.
N/A
ISO200F Pneumatic Valves 2,440 30 2.38" 7.4"
--
TV08QFPAA
P.O.R.
N/A
ISO250F Motorized Valves 5,050 55 2.75" 10.3"
--
TV10QFE1AA
P.O.R.
N/A
ISO250F Pneumatic Valves 5,050 55 2.75" 10.3"
--
TV10QFPAA
P.O.R.
N/A
ISO320F Motorized Valves 7,680 85 2.37" 12.52"
--
TV12QFE1AA
P.O.R.
N/A
ISO320F Pneumatic Valves 7,680 85 2.37" 12.52"
--
TV12QFPAA
P.O.R.
N/A
ISO400F Motorized Valves 16,300 135 2.75" 18"
--
TV16QFE1AA
P.O.R.
N/A
ISO400F Pneumatic Valves 16,300 135 2.75" 18"
--
TV16QFPAA
P.O.R.
N/A

Accessories Table

Type Description Manual PartNo Price Add
Item
Type Description Manual PartNo Price Add
Item
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO100 Flanges (1/pkg)
--
QF100-SAVR
$68.00
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO160 Flanges (1/pkg)
--
QF160-SAVR
$89.00
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO200 Flanges (1/pkg)
--
QF200-SAVR
$124.00
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO250 Flanges (1/pkg)
--
QF250-SAVR
$148.00
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO320 Flanges (1/pkg)
--
QF320-SAVR
$423.00
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO400 Flanges (1/pkg)
--
QF400-SAVR
$1,030.00

ISO:9001 The Kurt J. Lesker Company is an ISO:9001 certified company. Copyright ©1996-2017 Kurt J. Lesker Company® All rights reserved.