-
- PDF Downloads:
-
Product Section from Catalog
- Questions?
-
Email to USA
-
Email to Canada
-
Email to Europe
-
Email to China
-
Email to Rest of World
Protection Valve System
 |
New from Kurt J. Lesker Company-our patented Protection Vacuum Gate Valve's fast action (<0.3 secs to close) protects products that are "in-process" in the event of a vacuum pump failure. This bellows sealed, pneumatic actuated, SS valve system monitors up to four pumps with local or remote control and LCD status display.
The internal mechanism has a low particle generation design and is shielded, in open and closed positions, against particulate accumulation-leading to long life under adverse process conditions.
Flash Video
To watch a short informational flash video about the product please go to the Protection Valve System Video page.
Applications
For vacuum pump or chamber isolation in demanding processes:
- Plasma etching, cleaning, and desmearing
- All CVD processes (including MO, PE, HDP, LP, and AP)
- Sputter deposition and e-beam/thermal evaporation
- Nanotechnology processes with high particulate levels
- Thin film photovoltaic panels
Features:
- Significantly reduces down time by protecting your system from backstreaming process in the event of vacuum pump failure
- Ideally suited for high particulate generating applications
- Fast pneumatic actuation-close in <0.3 seconds
- Long cycle life under adverse process conditions
- Low shock/motion during open/close cycling
- Local/remote control with status LCD display
- 1, 2, 3, or 4 channel control options
Specifications Table
| Pressure Range (torr) | 1x10-7 mbar ~ 1 atm |
| Differential Press (torr) | Gate: 1 bar in either direction At opening: ≤30mbar in either direction |
| Material | Body: 304 SS Bellows: 316L SS Actuator: Al-6061 Seals: Viton® |
| Leak Rate (cc/sec) | < 6x10-8 mbar.L⁄sec |
| Bakeout Limit. (°C) | Body: <150°C Actuator: <60°C |
| Air Pressure | 60~100 PSI (4.1 ~ 6.9 bar) |
Dimensional Drawings
| Click on a thumbnail image to open the drawing in a new window. | ||||
 |
 |
|||
| Prot_Valve_top | Prot_Valve_side | |||
Ordering Table
All dimensions listed below, unless otherwise stated, are in inches.
| Flange Size |
Dim A | Dim B | Dim C | Dim D | Dim E | Dim F | PartNo |
|---|---|---|---|---|---|---|---|
Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]
Accessories Table
| Type | Description | PartNo |
|---|---|---|
Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]
