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Vacuum Valves

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To speak with someone directly please call 1-412-387-9200 or email international@lesker.com.
Product Downloads
For a downloadable datasheet on this product, please click here.

Protection Valve System

New from Kurt J. Lesker Company-our patented Protection Vacuum Gate Valve's fast action (<0.3 secs to close) protects products that are "in-process" in the event of a vacuum pump failure. This bellows sealed, pneumatic actuated, SS valve system monitors up to four pumps with local or remote control and LCD status display.

The internal mechanism has a low particle generation design and is shielded, in open and closed positions, against particulate accumulation-leading to long life under adverse process conditions.

Applications

For vacuum pump or chamber isolation in demanding processes:

  • Plasma etching, cleaning, and desmearing
  • CVD processes (including MO, PE, HDP, LP, and AP)
  • Nanotechnology processes with high particulate levels
  • Thin film photovoltaic panels

Features

  • Fast pneumatic actuation-close in <0.3 seconds
  • Patented shielding mechanism
  • O-ring sealed actuator
  • Long life cycle under adverse process conditions
  • Local/remote control with status LCD display
  • Easy routine maintenance
  • 1, 2, 3, or 4 channel control (on request)
  • UPS (on request)
  • Separable protection ring down (delayed down time adjustable, on request)
  • Heat jacket (on request)

Specifications Table

Pressure Range (torr) 1.0 x 10-6 ~ 12 x 105 Pa (abs)
Differential Press (torr) Opening Direction: 0.12MPa
Closing Direction: 0.12MPa
Max ΔPress Before Open (torr) 0.005MPa
Material Bellows: STS 316L
Gate (seat): STS 304, AL6061
Valve housing, Bonnet, Shaft (Stem), Bellows end piece: STS 304
Bonnet seal, Pneumatic seal: FKM (Viton®)
Gate seal, Vacuum seal: FKM (Viton®), FFKM (Kalrez®) on request
Leak Rate (cc/sec) Housing: <1.0 x 10-10 PA* m3/sec
Seat (Gate): <1.3 x 10-10 PA* m3/sec (±)
Bakeout Limit. (°C) Body: 105°C (Viton® o-ring) | 150°C (FFKM o-ring)
Actuator: 60°C
Mounting Horizontal

Product Video



Dimensional Drawings


Got VacuCADSM?
VacuCAD is a free library containing thousands of 2D CAD drawings (in DXF format) and 3D Models (in STP format) for many of our standard vacuum components and chambers. Please Log in

Ordering Table

(Click column headers to sort data)

Flange
Size
Dim A Dim B Dim C Dim D Dim E Dim F Manual PartNo Price Add Item
VacuCADSM
Flange
Size
Dim A Dim B Dim C Dim D Dim E Dim F Manual PartNo Price Add Item
VacuCADSM
100 ISO-K 3.3" (84mm) 9.5" (242mm) 20.1" (521mm) 6.6" (168mm) 7.3" (186mm) 1.2" (31.5mm)
--
GVP0400IK
P.O.R.
N/A
160 ISO-K 4.4" (112mm) 13.26" (337mm) 23.18" (589mm) 8.81" (224mm) 9.44" (240mm) 1.88" (48mm)
--
GVP0600IK
P.O.R.
(please log in)

Accessories Table

Type Description Manual PartNo Price Add
Item
Type Description Manual PartNo Price Add
Item
Controller
1 Channel Controller
--
GVPCONTROL1
P.O.R.
Controller
2 Channel Controller
--
GVPCONTROL2
P.O.R.
Controller
3 Channel Controller
--
GVPCONTROL3
P.O.R.
Controller
4 Channel Controller
--
GVPCONTROL4
P.O.R.

ISO:9001 The Kurt J. Lesker Company is an ISO:9001 certified company. Copyright ©1996-2017 Kurt J. Lesker Company® All rights reserved.