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Vacuum Valves > VAT Valves

VAT Gate Valves, Pendulum Valves, Vatterfly Valves

Mini UHV Gate Valve


Series 010
Mini-UHV-gate valves are for many applications. They can be provided with various actuators. The mechanism is free of lubricants.

Mini Gate Valve VATLOCK


Series 012
Mini vacuum gate valves are small, light-weight and low-priced.

Insertable Gate Valve


Series 080
Insertable gate valves are space saving due to direct mounting between DIN flanges.

Insertable Gate Valve


Series 081
Insertable gate valves are space saving due to direct mounting between DIN flanges.

HV Gate Valve


Series 091
The HV stainless steel gate valve with bellows is designed for harsh process conditions. The grease free wedge valve design allows multiple differential pressure (1 bar) openings even in a dirty and a dusty environment. Further features are the quick and easy cleaning of the gate seal and the bellows assembly.

UHV Gate Valve


Series 108
These standard UHV gate valves are for many applications. They are bellows sealed and their mechanism is free of lubricants. The approved VATLOCK sealing principle ensures a virtually shock-free locking.

HV Gate Valve with Bellows


Series 110
Stainless steel bellows sealed high vacuum gate valve for pump isolation applications

Vacuum Gate Valve


Series 121
These low-cost gate valves are designed for very easy maintenance.

HV Gate Valve


Series 140
These HV gate valves are well suited for process systems. Key features are compactness, high cycle life due to the rotary feedthrough, proved VATLOCK sealing principle, six possible actuator positions, low particle count.

Gate Valve Particle Free


Series 150
These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc.

Gate Valve Particle Free


Series 151
These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc.

Gate Valve Particle Free


Series 152
These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc

New Version Pendulum Valve


Series 162
The new pendulum valves are the successors of the previous Series 165 valves. The series 16.2 is designed for demanding corrosive processes such as CVD and ETCH. Although featuring the same proved sealing principle and quality as the previous types, they are lower-priced. Further features are low particle count and quick and easy cleaning.

Large Pendulum Valve


Series 168
These large pendulum valves are for many applications. Besides the main field of application - FPD (Flat Panel Display) production systems - they are often used in the coating industry. Key features are compactness, low vibration during opening and closing, low price.

Vatterfly Valve (Manual Actuator)


Series 200
Vatterfly valves designed for a high conductance.

Vatterfly Valve Extended Body (Manual Actuator)


Series 202
Vatterfly valves with extended body designed for a high conductance.

Vatterfly Valve


Series 203
Vatterfly valves designed for a high conductance. No mechanism in the vacuum.

Vatterfly Valve Extended Body


Series 204
Vatterfly valves with extended body designed for a high conductance. No mechanism in the vacuum.

All-metal Gate Valve


Series 481
All-metal gate valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator or with extended or compact double acting pneumatic actuator. Bakeable to 300°C in open and closed position. Self-locking in closed position. Radiation resistant.

All-metal Gate Valve


Series 482
All-metal gate valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator or with extended or compact double acting pneumatic actuator. Bakeable to 300°C in open and closed position. Self-locking in closed position. Radiation resistant.



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