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Vacuum Valves > VAT Valves > Angle Valves, Diaphragm Valves

VAT Variable Leak Valve (Series 590)



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Gas inlet valve to control very small gas flows in processes such as mass spectrometry, industrial applications, R&D, labs, etc.

Specifications Table

Series Number 590
Series Name Variable Leak Valve
Description All metal variable leak valve for precise, reproducible adjustment of gas flows. Available with manual actuator (knurled knot) or stepper motor driven. Closing to a mechanical stop to give a reliable leak tight position without the risk of over tightening. Bakeable to 300°C in the open and closed position and no requirement for lubrication during the specified lifetime.
Actuator Types Manual actuator (hand wheel), Stepper motor
Sealing Technology
Sealing Gate Metal
Sealing Bonnet Metal
Feedthrough Diaphragm
Leak Rate - Body < 1 . 10-10 mbar ls-1
Leak Rate - Seat < 1 . 10-10 mbar ls-1
Nominal inside diameters (ID) in mm (inches) 16 (5/8") - 16 (5/8")
Body material Stainless steel


Dimensional Drawings


Legend ▼ - Valve Seat Side
1 - Sealing Diaphragm
2 - Closing Spring
3 - Scale

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