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Thin Film Deposition System Components


TORUS® Magnetron Sputtering Cathodes


 
 
 
 
 
 
 
 

Deposition sources are components that, through a variety of techniques, facilitate a physical or chemical change in a base material in order to make it useful for creating thin films. Typical deposition sources include, but are not limited to, magnetron sputtering cathodes, thermal evaporation sources, electron beam evaporation sources, and ion beam sources.

KJLC manufactures, assembles, tests, and integrates TORUS® magnetron sputtering cathodes, resistive thermal evaporation equipment, and point source evaporators, both as stand-alone products to the vacuum science market and for use in our own thin film vacuum deposition systems.

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