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Combinatorial Magnetron Sputtering Advances with New Tools and New Predictive Techniques

January 19, 2016 | By KJLC Innovate

Combinatorial Magnetron Sputtering (CMS) has distinguished itself as a viable tool for the rapid development of vast libraries of complex materials. Researchers at the Joint Center for Artificial Photosynthesis, California Institute of Technology (Cal Tech) and the Kurt J. Lesker Company® (KJLC®) [1] have recently published work on Combinatorial Magnetron Sputtering (CMS) using a novel robotically controlled thin film deposition cathode tilt and substrate manipulation mechanism. Combinations of metal alloys, mixed metal oxides and nitrides have been demonstrated with the system as a basis for a predictive model developed by Cal Tech to streamline the design of new materials for certain critical applications.

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