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Lesker U Live! is series of free webinars spanning many topics taught by leading vacuum experts.

Lesker U provides the following:

  • High-value vacuum expert training
  • A solid base of understanding surrounding vacuum technology
  • Deep dives on specific vacuum technology topics

Quartz Crystal Microbalance (QCM) for Thin Film Deposition Process Monitoring

Quartz Crystal Microbalances (QCM) are devices that can monitor and control the deposition rate of evaporation, sputtering, and other thin film deposition processes in real time. QCM's are highly precise mass balances that can measure increases in weight on a scale necessary to determine the rate at which atoms or molecules are adsorbed onto a substrate as a thin film grows. They can have an accuracy on the nanogram or microgram scale. As molecules, from the thin film deposition process, accumulate on the surface of the crystal its vibrational frequency changes, which can be used, when calibrated, as a proxy for film thickness and deposition rate. This means they can resolve film thickness on the scale of tens of nanometers up to several microns. The QCM is made up of several components including an electroded quartz crystal, a temperature-controlled crystal holder, an oscillator and a controller which reads changes in oscillation, and stores process parameters. In this lecture, we will highlight each of these components, compare some of the more common options, and describe how these components work together for precise thin film deposition monitoring and control.

Duration: 1 Hour(s)

Expert(s): Evan Sawyer

Evan Sawyer is the Global Product Manager for Instrumentation and Pressure Measurement at the Kurt J Lesker Company. With a background in Chemistry, Evan is one of KJLC's product experts and specializes in chemical compatibility / reactivity, pressure measurement, pressure control, and gas analysis. Evan's talents have enabled him to contribute to many different system designs and upgrades for his global clientele. His skills also include troubleshooting instrumentation issues and the creation of technical documentation for his products to further assist the scientific community.

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Other Lesker U Live! Webinars


Cleaning Components for Vacuum Service

Despite nearly 2,500 years of progress in vacuum science, much of the practice of cleaning components for vacuum service remains shrouded in folklore. Further, many of the materials used by pioneers in this area are now banned for environmental and health reasons. In this brief webinar, basic procedures to clean components for high and ultra-high vacuum use will be discussed including the preparation of a facility in which to do cleaning, personal protective equipment, green or sustainable materials for cleaning, and tests to verify the efficacy of a cleaning process. Materials to be cleaned will include metals such as 300 series stainless steel, aluminum, and copper, as well as glass and some ceramics. Approaches to mitigate the contamination of components and vacuum chambers will also be reviewed.

Duration: 1 Hour(s)

Expert(s): J.R. Gaines

J.R. Gaines is the Technical Director of Education for the Kurt J. Lesker Company, (Jefferson Hills, PA). The Lesker Company is a global scientific equipment manufacturer supplying materials and tools for vacuum-enabled innovation. Gaines has more than 40 years of experience in the research, development and commercialization of advanced materials technologies including superconductivity, semiconductors, cryogenics, space simulation, energy generation, energy conversion and storage. His experience includes vacuum systems, thin film deposition, inorganic chemistry, nanotechnology, and advanced ceramic processing.

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Intro to Physical Vapor Deposition: Magnetron Sputtering

This course focuses in on the theory and practice of magnetron sputtering for the purpose of growing thin films. It covers the basics of magnetron sputtering cathodes and how they operate, vital process parameters in magnetron sputtering, different power modalities and their application, and practical tips on making good thin films and optimizing processes. Class is suitable for beginners in this technique as well as serving as a good refresher for those more experienced.

Duration: 1.25 Hour(s)

Expert(s): Rob Belan

Rob Belan is the Technical Director of PVD Products for the Kurt J. Lesker Co. with more than 35 years of PVD thin film and vacuum system experience. Rob has worked in research and industry making thin films for various microelectronic devices as well as optical components. Over these years he has developed expertise in magnetron sputtering, resistive thermal evaporation, and electron beam evaporation of thin films. He has taught courses in these topics world wide combining theoretical and practical teaching methods.

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Quartz Crystal Microbalance (QCM) for Thin Film Deposition Process Monitoring

Quartz Crystal Microbalances (QCM) are devices that can monitor and control the deposition rate of evaporation, sputtering, and other thin film deposition processes in real time. QCM's are highly precise mass balances that can measure increases in weight on a scale necessary to determine the rate at which atoms or molecules are adsorbed onto a substrate as a thin film grows. They can have an accuracy on the nanogram or microgram scale. As molecules, from the thin film deposition process, accumulate on the surface of the crystal its vibrational frequency changes, which can be used, when calibrated, as a proxy for film thickness and deposition rate. This means they can resolve film thickness on the scale of tens of nanometers up to several microns. The QCM is made up of several components including an electroded quartz crystal, a temperature-controlled crystal holder, an oscillator and a controller which reads changes in oscillation, and stores process parameters. In this lecture, we will highlight each of these components, compare some of the more common options, and describe how these components work together for precise thin film deposition monitoring and control.

Duration: 1 Hour(s)

Expert(s): Evan Sawyer

Evan Sawyer is the Global Product Manager for Instrumentation and Pressure Measurement at the Kurt J Lesker Company. With a background in Chemistry, Evan is one of KJLC's product experts and specializes in chemical compatibility / reactivity, pressure measurement, pressure control, and gas analysis. Evan's talents have enabled him to contribute to many different system designs and upgrades for his global clientele. His skills also include troubleshooting instrumentation issues and the creation of technical documentation for his products to further assist the scientific community.

Date:

REGISTER

Vacuum Gauge Technology: An Overview of Pressure Control for Vacuum Systems

The control of pressure in vacuum systems can be critical to the achievement of process parameters necessary for certain vacuum-enabled processes. While application like thin film deposition by thermal and e-beam evaporation are enhanced by extremely low operating pressures, other techniques, like sputtering and certain chemical processes, can only be accomplished at pressures which are significantly HIGHER than the base pressure achievable by a high vacuum pumping system. The control of pressure in vacuum can be achieved by a variety of techniques. In this webinar several techniques will be described, with examples, to control operating pressure in vacuum. Both manual and automated techniques will be discussed as they apply to various applications.

Duration: 1.25 Hour(s)

Expert(s): Evan Sawyer

Evan Sawyer is the Global Product Manager for Instrumentation and Pressure Measurement at the Kurt J Lesker Company. With a background in Chemistry, Evan is one of KJLC's product experts and specializes in chemical compatibility / reactivity, pressure measurement, pressure control, and gas analysis. Evan's talents have enabled him to contribute to many different system designs and upgrades for his global clientele. His skills also include troubleshooting instrumentation issues and the creation of technical documentation for his products to further assist the scientific community.

Date:

REGISTER

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