Lesker U Live! is series of free webinars spanning many topics taught by leading vacuum experts.
Lesker U provides the following:
- High-value vacuum expert training
- A solid base of understanding surrounding vacuum technology
- Deep dives on specific vacuum technology topics
Introduction to Physical Vapor Deposition: Thermal & E-Beam Evaporation
This class presents the basics of evaporation of materials to make thin films. Concentrating primarily on resistive thermal evaporation and electron beam evaporation as the primary methods of deposition. It explores the importance of thermal conductivity within each technique and how it can be used to produce high quality and consistent results. The first 1/2 hour is devoted to evaporation basics and resistive thermal evaporation. The second 1/2 hour is dedicated to e-beam evaporation. Class is suitable for beginners in this technique as well as serving as a good refresher for those more experienced.
Duration: 1 Hour(s)
Expert(s): Rob Belan
Rob Belan is the Technical Director of PVD Products for the Kurt J. Lesker Co. with more than 35 years of PVD thin film and vacuum system experience. Rob has worked in research and industry making thin films for various microelectronic devices as well as optical components. Over these years he has developed expertise in magnetron sputtering, resistive thermal evaporation, and electron beam evaporation of thin films. He has taught courses in these topics worldwide combining theoretical and practical teaching methods.
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REGISTERIntroduction to Physical Vapor Deposition: Magnetron Sputtering
This course focuses in on the theory and practice of magnetron sputtering for the purpose of growing thin films. It covers the basics of magnetron sputtering cathodes and how they operate, vital process parameters in magnetron sputtering, different power modalities and their application, and practical tips on making good thin films and optimizing processes. Class is suitable for beginners in this technique as well as serving as a good refresher for those more experienced.
Duration: 1 Hour(s)
Expert(s): Rob Belan
Rob Belan is the Technical Director of PVD Products for the Kurt J. Lesker Co. with more than 35 years of PVD thin film and vacuum system experience. Rob has worked in research and industry making thin films for various microelectronic devices as well as optical components. Over these years he has developed expertise in magnetron sputtering, resistive thermal evaporation, and electron beam evaporation of thin films. He has taught courses in these topics worldwide combining theoretical and practical teaching methods.
Date:
REGISTERQuartz Crystal Microbalance (QCM) for Thin Film Deposition Process Monitoring
Quartz Crystal Microbalances (QCM) are devices that can monitor and control the deposition rate of evaporation, sputtering, and other thin film deposition processes in real time. QCM's are highly precise mass balances that can measure increases in weight on a scale necessary to determine the rate at which atoms or molecules are adsorbed onto a substrate as a thin film grows. They can have an accuracy on the nanogram or microgram scale. This means they can resolve film thickness on the scale of tens of nanometers up to several microns. The QCM is made up of several components including an electroded quartz crystal, a temperature-controlled crystal holder, an oscillator and a controller which reads changes in oscillation, and stores process parameters. In this lecture, we will highlight each of these components, compare some of the more common options, and describe how these components work together for precise thin film deposition monitoring and control.
Duration: 1 Hour(s)
Expert(s): Evan Sawyer
Evan Sawyer is the Global Product Manager for Instrumentation and Pressure Measurement at the Kurt J Lesker Company. With a background in Chemistry, Evan is one of KJLC’s product experts and specializes in chemical compatibility / reactivity, pressure measurement, pressure control, and gas analysis. Evan's talents have enabled him to contribute to many different system designs and upgrades for his global clientele. His skills also include troubleshooting instrumentation issues and the creation of technical documentation for his products to further assist the scientific community.
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REGISTER
