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Zirconium Oxide ZrO2 Evaporation Process Notes

Zirconium oxide is a chemical compound with a chemical formula of ZrO2. It is often referred to as zirconia. It is white in appearance with a melting point of ~2,700°C, a density of 5.89 g/cc, and a vapor pressure of 10-4 Torr at ~2,200°C. Due to its resistance to cracks, zirconium oxide is heavily utilized for ceramic production. Cubic zirconia, which is zirconium oxide in cubic crystalline form, is sold by jewelers as a low-cost alternative to diamonds. Zirconium oxide is evaporated under vacuum for optical coatings, semiconductors, and fuel cells.

Zirconium Oxide ZrO2 Specifications

Material TypeZirconium Oxide
Color/AppearanceWhite, Solid
Melting Point (°C)~2,700
Theoretical Density (g/cc)5.89
SputterRF, RF-R
Max Power Density
(Watts/Square Inch)
Type of BondIndium, Elastomer
Z Ratio**1.00
Thermal Evaporation Techniques Boat:  W
E-Beam Crucible Liner MaterialGraphite, Tungsten
Temp. (°C) for Given Vap. Press. (Torr) 10-4:  ~2,200
Export Control (ECCN) 1C234
CommentsFilms oxygen deficient, clear and hard.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Zirconium Oxide (ZrO2) Products
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