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Aluminum (Al) Sputtering Targets

Aluminum (Al) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Aluminum (Al) General Information

Aluminum is one of the most common metals in the world. It can be found in kitchen utensils, cars, street lights, and the popular aluminum foil food packaging. Aluminum is a silvery-white, metallic material. It is light, malleable, ductile, and non-magnetic under normal conditions. It has a density of 2.7 g/cc, a melting point of 660°C, and a vapor pressure of 10-4 Torr at 1,010°C. Although it is not a strong material, it is a good conductor of heat and electricity and is able to form an oxide layer that is resistant to corrosion. Due to its high reactivity, it is rarely found in nature as a free element. When evaporated in a vacuum, aluminum layers form a reflective coating found on telescopes, automotive headlamps, mirrors, packages, and toys. It is widely used in the aerospace, automotive lighting, OLED, and optical industries.

Aluminum (Al) Specifications

Material TypeAluminum
SymbolAl
Atomic Weight26.9815386
Atomic Number13
Color/AppearanceSilvery, Metallic
Thermal Conductivity235 W/m.K
Melting Point (°C)660
Coefficient of Thermal Expansion23.1 x 10-6/K
Theoretical Density (g/cc)2.7
Z Ratio1.08
SputterDC
Max Power Density
(Watts/Square Inch)
150*
Type of BondIndium, Elastomer
CommentsAlloys W/Mo/Ta. Flash evap or use BN crucible.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

SDS
Click here for the Aluminum SDS.
Product Datasheet
Click for a downloadable datasheet on the Aluminum Al Sputtering Targets.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
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Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALXX401A2 $60.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 1.00" DIAMETER X 0.125" THICK MACHINED FACES, +/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALXX501A2 $138.00 Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 1.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 1.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALXX401A4 $92.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 1.00" DIAMETER X 0.250" THICK MACHINED FACES, +/-0.010" ALL 1.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALXX501A4 $143.00 Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.999% PURE, 1.30" DIAMETER X 0.250" THICK, +/-0.010" ALL, DRILLED AND TAPPED FOR 2-56, WITH KEEPER AND SCREW 1.30" Dia. x 0.250" Thick 99.999% U.S. Gun EJTALXX501.3K4 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 2.00" DIAMETER (+/-0.010") X 0.0625" THICK (+/-0.005") 2.00" Dia. x 0.0625" Thick 99.99% Most Standard Guns 1 EJTALXX402A1 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 2.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALXX402A2 $90.00 Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 2.00" DIAMETER X 0.125" THICK MACHINED FACES, +/-0.010" ALL 2.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALXX502A2 $118.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 2.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 2.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALXX402A4 $106.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 2.00" DIAMETER X 0.250" THICK, D&T 2-56 CENTER HOLE, 0.133" DEEP, +/-0.010" ALL, W/ KEEPER 2.00" Dia. x 0.250" Thick 99.99% U.S. Gun EJTALXX402K4 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 2.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL, W/ KEEPER, FOR 2" TORUS MAG KEEPER 2.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 2 2 EJTALXX402TK4 P.O.R. In Stock
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 2.00" DIAMETER X 0.250" THICK MACHINED FACES, +/-0.010" ALL 2.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALXX502A4 P.O.R. In Stock
Aluminum ALUMINUM TARGET, Al, 99.999%, PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, D & T FOR 2-56 CENTER HOLE, 0.133" DEEP, WITH 2" KEEPER 2.00" Dia. x 0.250" Thick 99.999% U.S. Gun EJTALXX502K4 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 2.00" DIAMETER X 0.250" THICK MACHINED FACES, +/-0.010" ALL, W/ KEEPER, FOR 2" TORUS MAG KEEPER 2.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 2 2 EJTALXX502TK4 P.O.R. In Stock
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 3.00" DIAMETER X 0.0625" THICK, +/-0.010" ALL 3.00" Dia. x 0.0625" Thick 99.99% Most Standard Guns 1 EJTALXX403A1 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALXX403A2 $108.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 3.00" DIAMETER X 0.125" THICK MACHINED FACES, +/-0.010" ALL 3.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALXX503A2 $181.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALXX403A4 $131.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ 6-32 CENTER HOLE, 0.133" DEEP, W/ KEEPER AND SCREW 3.00" Dia. x 0.250" Thick 99.99% U.S. Gun EJTALXX403K4 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, W/ KEEPER, FOR 3" TORUS MAG KEEPER 3.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 3 2 EJTALXX403TK4 P.O.R. In Stock
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 3.00" DIAMETER X 0.250" THICK, MACHINED FACES, +/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALXX503A4 $192.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 3.00" DIAMETER X 0.250" THICK, MACHINED FACES, +/-0.010" ALL, DRILLED AND TAPPED FOR 6-32, 0.133" DEEP, W/ KEEPER 3.00" Dia. x 0.250" Thick 99.999% U.S. Gun EJTALXX503K4 P.O.R. In Stock
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 3.00" DIAMETER X 0.250" THICK, MACHINED FACES, +/-0.010" ALL, W/ KEEPER, FOR 3" TORUS MAG KEEPER 3.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 3 2 EJTALXX503TK4 P.O.R. In Stock
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALXX404A2 $164.00 Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALXX504A2 $279.00 Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 4.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALXX404A4 $179.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL, DRILLED AND TAPPED FOR A 8-32 CENTER HOLE, 0.133" DEEP, WITH KEEPER AND SCREW 4.00" Dia. x 0.250" Thick 99.99% U.S. Gun EJTALXX404K4 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 4.00" DIAMETER X 0.250" THICK, MACHINED FACES, +/-0.010" ALL, W/ KEEPER, FOR 4" TORUS MAG KEEPER 4.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 4 2 EJTALXX404TK4 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 4.00" DIAMETER X 0.250" THICK, MACHINED FACES, +/-0.010" ALL 4.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALXX504A4 $290.00 In Stock
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 4.00" DIAMETER X 0.250" THICK, MACHINED FACES, +/-0.010" ALL, W/ KEEPER, FOR 4" TORUS MAG KEEPER 4.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 4 2 EJTALXX504TK4 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 4.00" DIAMETER X 0.375" THICK, MACHINED FACES, +/-0.010" ALL, W/ KEEPER, FOR 4" TORUS MAG KEEPER 4.00" Dia. x 0.375" Thick 99.999% TORUS Mag Keeper 4 2 EJTALXX504TK6 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 5.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 5.00" Dia x 0.125" Thick 99.99% Most Standard Guns 1 EJTALXX405A2 P.O.R. In Stock
Aluminum ALUMINUM FOIL, Al, 99.999% PURE, 54MM DIAMETER X 1MM THICK, +/-0.25MM ALL 54mm Dia. x 1mm Thick 99.999% EJTALXXSPL82 P.O.R. Call for Availability
Aluminum ALUMINUM FOIL, Al, 99.99% PURE, 54MM DIAMETER X 1MM THICK, +/-0.25MM ALL 54mm Dia. x 1mm Thick 99.99% EJTALXXSPL92 P.O.R. Call for Availability
Aluminum ALUMINUM FOIL, Al, 99.999% PURE, 57MM DIAMETER X 0.1MM THICK, +/-0.02MM THICK, +/-0.25MM DIAMETER 57mm Dia. x 0.1mm Thick 99.999% EVMAL50SPL01 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET FOR KJL108, Al, 99.99+% PURE, 57MM DIAMETER X 0.1MM THICK, +/-0.25MM DIA, +0.125MM/-0 THICK 57mm Dia. x 0.1mm Thick 99.99% KJL81013 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET FOR KJL108, Al, 99.99% PURE, 57MM DIAMETER X 0.2MM THICK, +/-0.25MM DIA, +0.127MM/-0 THK 57mm Dia. x 0.2mm Thick 99.99% KJL81070 P.O.R. Call for Availability
Aluminum ALUMINUM FOIL, Al, 99.99% PURE, 57MM DIAMETER X 0.3MM THICK, +/-0.02MM THICK, +/-0.25MM DIAMETER 57mm Dia. x 0.3mm Thick 99.99% EVMAL40SPL03 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.999% PURE, 57MM DIAMETER X 1.5MM THICK, +/-0.25MM ALL 57mm Dia. x 1.5mm Thick 99.999% EJTALXXSPL29 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 57MM DIAMETER X 1.0MM THICK, +/-0.010" ALL 57mm Dia. x 1mm Thick 99.99% EJTALXXSPL27 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.999% PURE, 57MM DIAMETER X 1MM THICK, +/-0.25MM ALL 57mm Dia. x 1mm Thick 99.999% EJTALXXSPL35 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.999% PURE 57MM DIAMETER X 2MM THICK, +/-0.25MM ALL 57mm Dia. x 2mm Thick 99.999% KJL81023 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE 57MM DIA X 2MM THICK, +/-0.25MM ALL 57mm Dia. x 2mm Thick 99.99% KJL81085 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 57MM DIAMETER X 3MM THICK, +/-0.25MM ALL 57mm Dia. x 3mm Thick 99.99% EJTALXXSPL18 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.999% PURE, 57MM DIAMETER X 3MM THICK, +/-.010" ALL 57mm Dia. x 3mm Thick 99.999% KJL81029 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 6.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 6.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALXX406A2 $230.00 Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.999% PURE, 6.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 6.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALXX506A2 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 6.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALXX406A4 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.9995% PURE, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 6.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALXX506A4 P.O.R. In Stock
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 60MM DIAMETER X 3MM THICK, +/-0.25MM ALL 60mm Dia. x 3mm Thick 99.99% EJTALXXSPL36 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.999% PURE, 60MM DIAMETER X 3MM THICK, +/-0.25MM ALL 60mm Dia. x 3mm Thick 99.999% EJTALXXSPL80 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 7.00" DIAMETER X 0.25" THICK, +/-0.010" ALL 7.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 Limited availability and specially priced. EJTALXX407A4 P.O.R. In Stock
Aluminum ALUMINUM TARGET, 99.99% PURE, 8.00" DIAMETER X 0.125" THICK +/- 0.010" ALL 8.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALXX408A2 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.999% PURE 8.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 8.00" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALXX508A2 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.99% PURE, 8.00" DIAMETER X 0.25" THICK +/- 0.010" ALL 8.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALXX408A4 P.O.R. Call for Availability
Aluminum ALUMINUM TARGET, Al, 99.999% PURE, 8.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 8.00" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALXX508A4 P.O.R. In Stock
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Limited availability and specially priced.

Contact Us - Aluminum Al Sputtering Targets