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Aluminum Oxide (Al2O3) Sputtering Targets

Aluminum Oxide (Al2O3) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Aluminum Oxide (Al2O3) General Information

Aluminum oxide, or more commonly called alumina, is a chemical compound with a chemical formula of Al2O3. It is generally white or clear in appearance with a melting point of 2,072°C, a vapor pressure of 10-4 Torr at 1,550°C, and a density of 3.97 g/cc. It is most commonly found in nature as the mineral corundum, from which ruby and sapphire are derived. Aluminum oxide is used extensively as an abrasive and is utilized in various industrial applications. It can also be found in paint, cosmetics, and surgical implants. It is evaporated under vacuum to form dielectric films for the semiconductor industry and as a mirror-like protective layer for optical coatings.

Aluminum Oxide (Al2O3) Specifications

Material TypeAluminum Oxide
SymbolAl2O3
Color/AppearanceWhite, Crystalline Solid
Melting Point (°C)2,072
Theoretical Density (g/cc)3.97
Z Ratio0.336
SputterRF-R
Max Power Density
(Watts/Square Inch)
20*
Type of BondIndium, Elastomer
CommentsSapphire excellent in E-beam; forms smooth, hard films.  Thermal evaporation likely not possible.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Notes:
  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

SDS
Click here for the Aluminum Oxide SDS.
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Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
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By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALOX401A2 $383.00 Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALOX501A2 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALOX401A4 $408.00 In Stock
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALOX501A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 2.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALOX402A2 $424.00 In Stock
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALOX502A2 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 2.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 2.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALOX402A4 $459.00 Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 2.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALOX502A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 3.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALOX403A2 $541.00 In Stock
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALOX503A2 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 3.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 3.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALOX403A4 $674.00 Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALOX503A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 4.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 4.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALOX404A2 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALOX504A2 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 4.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL 4.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALOX404A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 4.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALOX504A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 6.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL 6.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALOX406A2 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 6.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 6.0" Dia. x 0.125" Thick 99.999% Most Standard Guns 1 EJTALOX506A2 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.5% PURE, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 6.0" Dia. x 0.250" Thick 99.5% Most Standard Guns 1 Limited availability and specially priced. EJTALOX256A4 P.O.R. In Stock
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 6.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL, PER DRAWING 6.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALOX406A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 6.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALOX506A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.5% PURE, 8.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 8.0" Dia. x 0.125" Thick 99.5% Most Standard Guns 1 Limited availability and specially priced. EJTALOX258A2 P.O.R. In Stock
Aluminum Oxide Aluminum Oxide Circular Sputter Target (8.0" Diameter x 0.125" Thickness, 99.99% pure) 8.0" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTALOX408A2 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.5% PURE, 8.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 8.0" Dia. x 0.250" Thick 99.5% Most Standard Guns 1 Limited availability and specially priced. EJTALOX258A4 P.O.R. In Stock
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 8.00" DIAMETER X 0.250" THICK, +/-0.015" ALL 8.0" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTALOX408A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 8.00" DIAMETER X 0.250" THICK, +/-.010" ALL 8.0" Dia. x 0.250" Thick 99.999% Most Standard Guns 1 EJTALOX508A4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
Limited availability and specially priced.

Bonded Assemblies Ordering Table

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Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia x 0.125" Thick 99.99% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUALOX402A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 2 2.00" Dia x 0.125" Thick 99.99% Indium 2.00" Dia x 0.092" Thick Standard TORUS 2 EJUALOX402T4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER, FOR TORUS MAG KEEPER 2 2.00" Dia x 0.125" Thick 99.99% Elastomer 2.00" Dia x 0.125" Thick TORUS Mag Keeper 2 2 EJUALOX402TK4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.99% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUALOX403A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER, 6-32 SCREW 3.00" Dia x 0.125" Thick 99.99% Elastomer 3.00" Dia x 0.125" Thick U.S. Gun EJUALOX403K4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 3 3.00" Dia x 0.125" Thick 99.99% Indium 3.00" Dia x 0.092" Thick Standard TORUS 3 EJUALOX403T4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR 3" TORUS MAG KEEPER 3.00" Dia x 0.125" Thick 99.99% Elastomer 3.00" Dia x 0.125" Thick TORUS Mag Keeper 3 2 EJUALOX403TK4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.99% PURE, 4.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia x 0.125" Thick 99.99% Indium 4.00" Dia x 0.125" Thick Most Standard Guns 1 EJUALOX404A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia x 0.125" Thick 99.999% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUALOX502A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 2 2.00" Dia x 0.125" Thick 99.999% Indium 2.00" Dia x 0.092" Thick Standard TORUS 2 EJUALOX502T4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR TORUS MAG KEEPER 2, PER DRAWING 2.00" Dia x 0.125" Thick 99.999% Elastomer 2.00" Dia x 0.125" Thick TORUS Mag Keeper 2 2 EJUALOX502TK4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.999% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUALOX503A4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.999% Elastomer 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUALOX503E4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR 3" TORUS MAG KEEPER 3.00" Dia x 0.125" Thick 99.999% Elastomer 3.00" Dia x 0.125" Thick TORUS Mag Keeper 3 2 EJUALOX503TK4 P.O.R. Call for Availability
Aluminum Oxide ALUMINUM OXIDE TARGET, Al2O3, 99.999% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 4.00" DIAMETER X 0.100" THICK, +/-0.010" ALL, W/ KEEPER, 8-32 SCREW 4.00" Dia x 0.125" Thick 99.999% Elastomer 4.00" Dia x 0.100" Thick U.S. Gun EJUALOX504K4 P.O.R. Call for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Contact Us - Aluminum Oxide Al2O3 Sputtering Targets