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Calcium (Ca) Sputtering Targets


Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Material TypeCalcium
Atomic Weight40.078
Atomic Number20
Color/AppearanceSilvery White, Metallic
Thermal Conductivity200 W/m.K
Melting Point (°C)839
Coefficient of Thermal Expansion22.3 x 10-6/K
Theoretical Density (g/cc)1.54
Z Ratio2.62
Max Power Density*
(Watts/Square Inch)
UN Number 1401
CommentsCorrodes in air.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Material Notes


  • Due to the highly reactive nature of these materials, packaging in oil is required to reduce the opportunity for oxidation or other reaction. Please click here for the recommended cleaning procedure.
  • Bonding service not available on this material.

Hazardous Materials


  • Hazardous shipping charges may apply.

Click here for the Calcium SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Material Size Purity Compatible Guns Part # Price Add To
Calcium 2.0" Dia. x 0.125" Thick 99.5% All Standard Guns EJTCAXX252A2 P.O.R.
Calcium 2.0" Dia. x 0.250" Thick 99.5% All Standard Guns EJTCAXX252A4 P.O.R.
Calcium 3.0" Dia. x 0.125" Thick 99% All Standard Guns EJTCAXX203A2 P.O.R.
Calcium 3.0" Dia. x 0.250" Thick 99% All Standard Guns EJTCAXX203A4 P.O.R.
Calcium 4.0" Dia. x 0.125" Thick 99.5% All Standard Guns EJTCAXX254A2 P.O.R.