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Calcium (Ca) Sputtering Targets

Calcium (Ca) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact for current pricing or for a quote on sputtering targets and other deposition products not listed.

Calcium (Ca) General Information

Calcium is classified as an alkaline earth metal on the Periodic Table. It is silvery-white in appearance and soft enough that it can be cut with a sharp knife. It is known to easily oxidize when exposed to the atmosphere. Calcium has a density of 1.54 g/cc, a melting point of 839°C, and a vapor pressure of 10-4 Torr at 459°C. Calcium is an essential building block for human life as it is found in abundance in human skeletons and teeth. Calcium and its compounds are also used to produce commercial concrete and cement. Calcium, along with its alloys and compounds, is evaporated under vacuum to make optical storage media, superconductors, and anti-reflective layers.

Calcium (Ca) Specifications

Material TypeCalcium
Atomic Weight40.078
Atomic Number20
Color/AppearanceSilvery White, Metallic
Thermal Conductivity200 W/m.K
Melting Point (°C)839
Coefficient of Thermal Expansion22.3 x 10-6/K
Theoretical Density (g/cc)1.54
Z Ratio2.62
SputterRF, DC
Max Power Density
(Watts/Square Inch)
UN Number 1401
CommentsCorrodes in air.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Material Notes


  • Due to the highly reactive nature of these materials, packaging in oil is required to reduce the opportunity for oxidation or other reaction. Please click here for the recommended cleaning procedure.
  • Bonding service not available on this material.

Hazardous Materials


  • Hazardous shipping charges may apply.

Click here for the Calcium SDS.
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By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Material Size Purity Compatible Guns Notes Part Number Price In Stock Add To
Calcium 2.0" Dia. x 0.125" Thick 99.5% Most Standard Guns 1 EJTCAXX252A2 P.O.R. Call for Availability
Calcium 2.0" Dia. x 0.250" Thick 99.5% Most Standard Guns 1 EJTCAXX252A4 P.O.R. Call for Availability
Calcium 3.0" Dia. x 0.125" Thick 99% Most Standard Guns 1 EJTCAXX203A2 P.O.R. Call for Availability
Calcium 3.0" Dia. x 0.250" Thick 99% Most Standard Guns 1 EJTCAXX203A4 P.O.R. Call for Availability
Calcium 4.0" Dia. x 0.125" Thick 99.5% Most Standard Guns 1 EJTCAXX254A2 P.O.R. Call for Availability

Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.