Close

Please select your country or region to be
directed to the appropriate Lesker site.

Representative Image

Cerium Oxide (CeO2) Sputtering Targets

Cerium Oxide (CeO2) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here .

Cerium Oxide (CeO2) General Information

Cerium oxide, also known as ceria, is an inorganic chemical compound with a chemical formula of CeO2. It is white or pale yellow in color with a density of 7.13 g/cc, a melting point of ~2,600°C, and a vapor pressure of 10-4 Torr at 2,310°C. It is primarily used for polishing but can also be found as a sensor in catalytic converters in automobiles. Cerium oxide is evaporated under vacuum to form anti-reflective layers for optical coatings and as buffer layers in high temperature superconductors.

Cerium Oxide (CeO2) Specifications

Material TypeCerium (IV) Oxide
SymbolCeO2
Color/AppearanceWhite or Pale Yellow, Crystalline Solid
Melting Point (°C)~2,600
Theoretical Density (g/cc)7.13
Z Ratio**1.00
SputterRF, RF-R
Max Power Density
(Watts/Square Inch)
20*
Type of BondIndium, Elastomer
CommentsVery little decomposition.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.

Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Notes:
  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

SDS
Click here for the Cerium Oxide SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we are asked.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Process Equipment Expertise
Process Equipment Expertise

By staying on the leading edge of engineering and technology, we offer our customers the advantage of unparalleled knowledge and expertise in the manufacturing of TORUS® Magnetron Sputtering Cathodes and Thin Film Deposition Vacuum Systems.

Ordering Table

X CLOSE
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCEOX401A2 $725.00 Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCEOX401A4 $776.00 In Stock
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCEOX402A2 $944.00 In Stock
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 2.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCEOX402A4 $969.00 Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCEOX403A2 $1,173.00 In Stock
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCEOX403A4 $1,530.00 Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCEOX404A2 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TRAGET, CeO2, 99.99% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 4.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCEOX404A4 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 5.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 5.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCEOX405A2 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 5.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 5.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCEOX405A4 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 6.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 6.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCEOX406A2 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 6.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 6.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCEOX406A4 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 7.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 7.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCEOX407A2 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 7.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 7.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCEOX407A4 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 8.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 8.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTCEOX408A2 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 8.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 8.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTCEOX408A4 P.O.R. Call for Availability
X CLOSE

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Bonded Assemblies Ordering Table

X CLOSE
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia x 0.125" Thick 99.99% Indium 1.00" Dia x 0.125" Thick Most Standard Guns 1 EJUCEOX401A4 P.O.R. In Stock
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia x 0.125" Thick 99.99% Indium 2.00" Dia x 0.125" Thick Most Standard Guns 1 EJUCEOX402A4 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 2 2.00" Dia x 0.125" Thick 99.99% Indium 2.00" Dia x 0.092" Thick Standard TORUS 2 EJUCEOX402T4 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, W/ KEEPER AND SCREW, FOR 2" TORUS MAG KEEPER 2.00" Dia x 0.125" Thick 99.99% Elastomer 2.00" Dia x 0.125" Thick TORUS Mag Keeper 2 2 EJUCEOX402TK4 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.99% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUCEOX403A4 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 3 3.00" Dia x 0.125" Thick 99.99% Indium 3.00" Dia x 0.092" Thick Standard TORUS 3 EJUCEOX403T4 P.O.R. Call for Availability
Cerium Oxide CERIUM OXIDE TARGET, CeO2, 99.99% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia x 0.125" Thick 99.99% Indium 4.00" Dia x 0.125" Thick Most Standard Guns 1 EJUCEOX404A4 P.O.R. Call for Availability
X CLOSE

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
2.
Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding.
Contact Us - Cerium Oxide CeO2 Sputtering Targets