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Cobalt (Co) Sputtering Targets


Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Cobalt is one of the most widely recognized metals in the world. It has a density of 8.9 g/cc, a melting point of 1,495°C, and a vapor pressure of 10-4 Torr at 1,200°C It is a lustrous, hard metal that is gray in appearance and characteristically ferromagnetic. One of its most popular uses is as a blue pigment found in paint, jewelry, and glass. It is often alloyed with other metals to make engine parts and cutting tools. Its two main vacuum applications are as a ferromagnetic layer in the production of magnetic storage media and as a transitional layer in battery fabrication.


Material TypeCobalt †
Atomic Weight58.933195
Atomic Number27
Color/AppearanceLustrous, Metallic, Grayish Tinge
Thermal Conductivity100 W/m.K
Melting Point (°C)1,495
Coefficient of Thermal Expansion13.0 x 10-6/K
Theoretical Density (g/cc)8.9
FerromagneticMagnetic Material
Z Ratio0.343
Max Power Density*
(Watts/Square Inch)
CommentsAlloys with W/Ta/Mo.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Material Notes

NOTE: Ferromagnetic materials require additional consideration when selecting configuration/ thickness. High strength magnets or thinner targets may be required. Bonding these materials creates additional concerns due to the increase in distance from the magnets. Contact your magnetron sputter cathode supplier or reference your equipment manual for additional information.

Click here for the Cobalt SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Material Size Purity Compatible Guns Part # Price Add To
Cobalt 1.0" Dia. x 0.0625" Thick 99.95% - EJTCOXX351A1 P.O.R.
Cobalt 1.0" Dia. x 0.125" Thick 99.95% - EJTCOXX351A2 $89.00
Cobalt 1.0" Dia. x 0.250" Thick 99.95% - EJTCOXX351A4 $100.00
Cobalt 2.0" Dia. x 0.0625" Thick 99.95% All Standard Guns EJTCOXX352A1 P.O.R.
Cobalt 2.0" Dia. x 0.125" Thick 99.95% All Standard Guns EJTCOXX352A2 $121.00
Cobalt 2.0" Dia. x 0.250" Thick 99.95% - EJTCOXX352A4 $115.00
Cobalt 3.0" Dia. x 0.0625" Thick 99.95% All Standard Guns EJTCOXX353A1 P.O.R.
Cobalt 3.0" Dia. x 0.125" Thick 99.95% All Standard Guns EJTCOXX353A2 $141.00
Cobalt 3.0" Dia. x 0.250" Thick 99.95% - EJTCOXX353A4 $171.00
Cobalt 4.0" Dia. x 0.125" Thick 99.95% All Standard Guns EJTCOXX354A2 $235.00
Cobalt 4.0" Dia. x 0.250" Thick 99.95% - EJTCOXX354A4 $240.00
Cobalt 6.0" Dia. x 0.125" Thick 99.95% - EJTCOXX356A2 P.O.R.
Cobalt 6.0" Dia. x 0.250" Thick 99.95% - EJTCOXX356A4 $700.00
Cobalt 8.0" Dia. x 0.125" Thick 99.95% - EJTCOXX358A2 P.O.R.
Cobalt 8.0" Dia. x 0.250" Thick 99.95% - EJTCOXX358A4 P.O.R.